Patents
US 9983232 B2: Prober for testing devices in a repeat structure on a substrate
- Granted
- 2018-05-29
- Filed
- 2014-09-19 application 14491606
- Type
- Utility · 9 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
Source: PVGPATDIS, file of 2026-04-10 (ipg180529.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Cascade Microtech, Inc. 96 patents | US company or organization | Beaverton, OR | CASCADE MICROTECH INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Frank-Michael Werner | Dresden, DE | 4 | PVGPATDIS, file of 2026-04-10 | |
| Matthias Zieger | Riesa, DE | 3 | PVGPATDIS, file of 2026-04-10 | |
| Sebastian Giessmann | Großenhain, DE | 14 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01R | Measuring electric variables; measuring magnetic variables | G01R1/073 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2025-08-07 | Release of security interest Release of security interest | HSBC BANK USA, NATIONAL ASSOCIATION signed 2025-08-06 | FORMFACTOR, INC. LIVERMORE, CA | 72853/1 | PASDL, file of 2026-10-15 |
| 2025-07-29 | Security interest Security interest Security interest | FORMFACTOR, INC. signed 2025-07-29 | WELLS FARGO BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT SAN ANTONIO, TX | 72263/272 | PASDL, file of 2026-10-25 |
| 2021-09-01 | Assignment Assignment of assignor's interest | FORMFACTOR BEAVERTON, INC. signed 2021-08-26 | FORMFACTOR, INC. LIVERMORE, CA | 57393/609 | PASDL, file of 2026-10-15 |
| 2018-07-18 | Name change Change of name | CASCADE MICROTECH, INC. signed 2018-05-14 | FORMFACTOR BEAVERTON, INC. BEAVERTON, OR | 46573/664 | PASDL, file of 2026-10-15 |
| 2016-07-12 | Security interest Security interest Security interest in united states patents and trademarks | FORMFACTOR, INC. signed 2016-06-24 ASTRIA SEMICONDUCTOR HOLDINGS, INC. signed 2016-06-24 CASCADE MICROTECH, INC. signed 2016-06-24 MICRO-PROBE INCORPORATED signed 2016-06-24 | HSBC BANK USA, NATIONAL ASSOCIATION SAN FRANCISCO, CA | 39184/280 | PASDL, file of 2026-10-15 |
| 2014-09-19 | Merger Merger | SUSS MICROTEC TEST SYSTEMS GMBH signed 2010-01-27 | CASCADE MICROTECH, INC. BEAVERTON, OR | 33782/45 | ECORSEXC, file of 2026-09-25 |
| 2014-09-19 | Assignment Assignment of assignor's interest | GIESSMANN, SEBASTIAN signed 2009-01-19 WERNER, FRANK-MICHAEL signed 2009-01-19 ZIEGER, MATTHIAS signed 2009-01-19 | SUSS MICROTEC TEST SYSTEMS GMBH SACKA | 33781/609 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.