Patents
US 9982664 B2: Systems and methods for metering a dose volume of fluid used to treat microelectronic substrates
- Granted
- 2018-05-29
- Filed
- 2015-07-31 application 14815467
- Type
- Utility · 16 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
The disclosure relates to systems and methods for metering a dose volume of fluid that may be used to treat microelectronic substrates. The system enables precision dispensing of relatively small amounts of a liquid chemical into a chemical bath or processing chamber for microelectronic substrates. The dispensing device may include a fluid conduit with a plurality of actuation devices that may limit fluid communication between the actuation devices and store a portion of the fluid in expandable membrane. The actuation devices may push or pull the fluid within the fluid conduit when the expandable membrane expands or contracts. The configuration and operation of the actuation devices may enable the collection, isolation, and dispensing of the dose volume.
Source: PVGPATDIS, file of 2026-04-10 (ipg180529.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| TEL FSI, INC. 34 patents | US company or organization | Chaska, MN | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| William P. Inhofer | Plymouth, MN | 5 | PVGPATDIS, file of 2026-04-10 | |
| Lance Van Elsen | Oakdale, MN | 1 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| F04B | Positive-displacement machines for liquids; pumps | F04B23/04 | PVGPATDIS, file of 2026-04-10 |
| B05B | Spraying apparatus; atomising apparatus; nozzles | B05B11/1032 | PVGPATDIS, file of 2026-04-10 |
| B81C | Processes or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems | B81C1/00539 | PVGPATDIS, file of 2026-04-10 |
| C08J | Working-up; general processes of compounding; after-treatment not covered by subclasses c08b, c08c, c08f, c08g or c08h | C08J7/00 | PVGPATDIS, file of 2026-04-10 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P50/642 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2020-07-30 | Correction Conversion | TEL FSI, INC. signed 2019-12-31 | TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC. CHASKA, MN | 53366/139 | PASDL, file of 2026-10-15 |
| 2015-08-12 | Assignment Assignment of assignor's interest | VAN ELSEN, LANCE signed 2015-08-03 INHOFER, WILLIAM P. signed 2015-08-10 | TEL FSI, INC. CHASKA, MN | 36307/934 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.