Patents
US 9887107 B2: Methodologies for rinsing tool surfaces in tools used to process microelectronic workpieces
- Granted
- 2018-02-06
- Filed
- 2016-02-15 application 15043854
- Type
- Utility · 8 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
Rinsing methodologies and components to accomplish rinsing of tool surfaces in tools that are used to process one or more microelectronic workpieces. The invention can be used to rinse structures that overlie a workpiece being treated in such a manner to function in part as a lid over the process chamber while also defining a tapering flow channel over the workpiece. Rather than spray rinsing liquid onto the surface in a manner that generates undue splashing, droplet, or mist generation, a swirling flow of rinse liquid is generated on a surface of at least one fluid passage upstream from the surface to be rinsed. The swirling flow then provides smooth, uniform wetting and sheeting action to accomplish rinsing with a significantly reduced risk of generating particle contamination.
Source: PVGPATDIS, file of 2026-04-10 (ipg180206.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| TEL FSI, INC. 34 patents | US company or organization | Chaska, MN | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Mark A. Stiyer | Minneapolis, MN | 2 | PVGPATDIS, file of 2026-04-10 | |
| David DeKraker | Burnsville, MN | 14 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/0414 | PVGPATDIS, file of 2026-04-10 |
| B08B | Cleaning in general; prevention of fouling in general | B08B3/02 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2020-07-30 | Correction Conversion | TEL FSI, INC. signed 2019-12-31 | TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC. CHASKA, MN | 53366/139 | PASDL, file of 2026-10-15 |
| 2016-03-16 | Merger Merger and change of name | FSI INTERNATIONAL, INC. signed 2012-10-11 RB MERGER CORP. signed 2012-10-11 | TEL FSI, INC. CHASKA, MN | 38004/907 | ECORSEXC, file of 2026-09-25 |
| 2016-03-16 | Assignment Assignment of assignor's interest | DEKRAKER, DAVID signed 2011-06-15 STIYER, MARK A. signed 2011-06-25 | FSI INTERNATIONAL, INC. CHASKA, MN | 37996/937 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.