Patents
US 9784763 B1: Shielded probe systems with controlled testing environments
- Granted
- 2017-10-10
- Filed
- 2016-04-08 application 15094716
- Type
- Utility · 20 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting stack extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting stack includes an electrically conductive support surface and a temperature-controlled chuck. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting stack.
Source: PVGPATDIS, file of 2026-04-10 (ipg171010.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Cascade Microtech, Inc. 96 patents | US company or organization | Beaverton, OR | CASCADE MICROTECH INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Michael Teich | Radebeul, DE | 16 | PVGPATDIS, file of 2026-04-10 | |
| Karsten Stoll | Wilthen, DE | 9 | PVGPATDIS, file of 2026-04-10 | |
| Walter Matthias Clauss | Radeberg, DE | 2 | PVGPATDIS, file of 2026-04-10 | |
| Swen Schmiedchen | Dresden, DE | 2 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01R | Measuring electric variables; measuring magnetic variables | G01R1/18 | PVGPATDIS, file of 2026-04-10 |
| G01N | Investigating or analysing materials by determining their chemical or physical properties | G01N27/42 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2025-07-29 | Security interest Security interest Security interest | FORMFACTOR, INC. signed 2025-07-29 | WELLS FARGO BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT SAN ANTONIO, TX | 72263/272 | PASDL, file of 2026-10-25 |
| 2021-09-01 | Assignment Assignment of assignor's interest | FORMFACTOR BEAVERTON, INC. signed 2021-08-26 | FORMFACTOR, INC. LIVERMORE, CA | 57393/609 | PASDL, file of 2026-10-15 |
| 2018-07-18 | Name change Change of name | CASCADE MICROTECH, INC. signed 2018-05-14 | FORMFACTOR BEAVERTON, INC. BEAVERTON, OR | 46573/664 | PASDL, file of 2026-10-15 |
| 2016-04-08 | Assignment Assignment of assignor's interest | SCHMIEDCHEN, SWEN signed 2016-03-31 STOLL, KARSTEN signed 2016-03-31 TEICH, MICHAEL signed 2016-03-31 CLAUSS, WALTER MATTHIAS signed 2016-04-06 | CASCADE MICROTECH, INC. BEAVERTON, OR | 38232/181 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.