Patents
US 9666456 B2: Method and apparatus for treating a workpiece with arrays of nozzles
- Granted
- 2017-05-30
- Filed
- 2015-03-02 application 14635826
- Type
- Utility · 11 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.
Source: PVGPATDIS, file of 2026-04-10 (ipg170530.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| TEL FSI, INC. 34 patents | US company or organization | Chaska, MN | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Jimmy D. Collins | Allen, TX | 11 | PVGPATDIS, file of 2026-04-10 | |
| David DeKraker | Burnsville, MN | 14 | PVGPATDIS, file of 2026-04-10 | |
| Tracy A. Gast | Waconia, MN | 10 | PVGPATDIS, file of 2026-04-10 | |
| Alan D. Rose | Wylie, TX | 13 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H01L | Semiconductor devices not covered by class h10 | H01L21/67051 | PVGPATDIS, file of 2026-04-10 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/0414 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2020-07-30 | Correction Conversion | TEL FSI, INC. signed 2019-12-31 | TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC. CHASKA, MN | 53366/139 | PASDL, file of 2026-10-15 |
| 2017-03-23 | Merger Merger and change of name | FSI INTERNATIONAL, INC. signed 2012-10-11 RB MERGER CORP. signed 2012-10-11 | TEL FSI, INC. CHASKA, MN | 42082/620 | ECORSEXC, file of 2026-09-25 |
| 2017-03-23 | Assignment Assignment of assignor's interest | COLLINS, JIMMY D. signed 2007-08-21 DEKRAKER, DAVID signed 2007-08-21 ROSE, ALAN D. signed 2007-08-23 GAST, TRACY A. signed 2007-08-28 | FSI INTERNATIONAL, INC. CHASKA, MN | 41704/882 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.