Patents
US 9564378 B2: Detection of lost wafer from spinning chuck
- Granted
- 2017-02-07
- Filed
- 2014-12-10 application 14566109
- Type
- Utility · 13 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
The disclosure relates to systems and methods for detecting when a microelectronic substrate is no longer properly secured or lost from a rotating chuck. A microelectronic substrate may be secured to a rotating chuck that may rotate the substrate when exposing the substrate to the chemicals during a treatment in a process chamber. The rotating chuck may include one or more detectors to detect the position of a gripping mechanism that secure the microelectronic substrate. The detectors may generate an electrical signal that correlates to the position of the microelectronic substrate. When the electrical signal(s) exceed a threshold the system may stop rotating the chuck to prevent additional damage to the process chamber.
Source: PVGPATDIS, file of 2026-04-10 (ipg170207.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| TEL FSI, INC. 34 patents | US company or organization | Chaska, MN | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Alan D. Rose | Wylie, TX | 13 | PVGPATDIS, file of 2026-04-10 | |
| Michael Gruenhagen | Norwood Young America, MN | 3 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H01L | Semiconductor devices not covered by class h10 | H01L21/68728 | PVGPATDIS, file of 2026-04-10 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P74/238 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2020-07-30 | Correction Conversion | TEL FSI, INC. signed 2019-12-31 | TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC. CHASKA, MN | 53366/139 | PASDL, file of 2026-10-15 |
| 2015-02-12 | Assignment Assignment of assignor's interest | GRUENHAGEN, MICHAEL signed 2015-02-11 ROSE, ALAN D. signed 2015-02-11 | TEL FSI, INC. CHASKA, MN | 34946/616 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.