Patents

US 9435858 B2: Focusing optical systems and methods for testing semiconductors

Granted
2016-09-06
Filed
2011-03-14 application 13634009
Type
Utility · 18 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

Focusing optical systems and methods for testing semiconductors are disclosed herein. The methods include receiving an image of a probe through a single optical path of a microscope, substantially focusing the microscope on the probe, and determining a vertical height adjustment between the probe and a device under test based upon the focusing.

Source: PVGPATDIS, file of 2026-04-10 (ipg160906.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
Cascade Microtech, Inc. 96 patentsUS company or organizationBeaverton, ORCASCADE MICROTECH INC SEC filer EXACT medium confidence: identical full name, one of each nationallyPVGPATDIS, file of 2026-04-10

Inventors

InventorPlacePatentsPerson pageSource
Peter AndrewsBeaverton, OR7PVGPATDIS, file of 2026-04-10
David HessBeaverton, OR6PVGPATDIS, file of 2026-04-10

CPC categories

SubclassCategoryFirst groupSource
G01RMeasuring electric variables; measuring magnetic variablesG01R31/2891PVGPATDIS, file of 2026-04-10

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

RecordedWhatFromToReel/frameSource
2025-08-07Release of security interest
Release of security interest
HSBC BANK USA, NATIONAL ASSOCIATION signed 2025-08-06FORMFACTOR, INC. LIVERMORE, CA72853/1PASDL, file of 2026-10-15
2025-07-29Security interest Security interest
Security interest
FORMFACTOR, INC. signed 2025-07-29WELLS FARGO BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT SAN ANTONIO, TX72263/272PASDL, file of 2026-10-25
2021-09-01Assignment
Assignment of assignor's interest
FORMFACTOR BEAVERTON, INC. signed 2021-08-26FORMFACTOR, INC. LIVERMORE, CA57393/609PASDL, file of 2026-10-15
2018-07-18Name change
Change of name
CASCADE MICROTECH, INC. signed 2018-05-14FORMFACTOR BEAVERTON, INC. BEAVERTON, OR46573/664PASDL, file of 2026-10-15
2016-07-12Security interest Security interest
Security interest in united states patents and trademarks
FORMFACTOR, INC. signed 2016-06-24
ASTRIA SEMICONDUCTOR HOLDINGS, INC. signed 2016-06-24
CASCADE MICROTECH, INC. signed 2016-06-24
MICRO-PROBE INCORPORATED signed 2016-06-24
HSBC BANK USA, NATIONAL ASSOCIATION SAN FRANCISCO, CA39184/280PASDL, file of 2026-10-15
2012-09-11Assignment
Assignment of assignor's interest
ANDREWS, PETER signed 2012-09-04
HESS, DAVID signed 2012-09-04
CASCADE MICROTECH, INC. BEAVERTON, OR28934/393ECORSEXC, file of 2026-09-25

Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.

USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.