Patents
US 9395411 B2: Method for testing a test substrate under defined thermal conditions and thermally conditionable prober
- Granted
- 2016-07-19
- Filed
- 2013-07-29 application 13953545
- Type
- Utility · 9 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.
Source: PVGPATDIS, file of 2026-04-10 (ipg160719.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Cascade Microtech, Inc. 96 patents | US company or organization | Beaverton, OR | CASCADE MICROTECH INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Joerg Kiesewetter | Ortrand, DE | 4 | PVGPATDIS, file of 2026-04-10 | |
| Stojan Kanev | Ortrand, DE | 36 | PVGPATDIS, file of 2026-04-10 | |
| Michael Teich | Bad Marienberg, DE | 16 | PVGPATDIS, file of 2026-04-10 | |
| Karsten Stoll | Wilthen, DE | 9 | PVGPATDIS, file of 2026-04-10 | |
| Axel Schmidt | Ortrand, DE | 31 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01R | Measuring electric variables; measuring magnetic variables | G01R31/2891 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2025-08-07 | Release of security interest Release of security interest | HSBC BANK USA, NATIONAL ASSOCIATION signed 2025-08-06 | FORMFACTOR, INC. LIVERMORE, CA | 72853/1 | PASDL, file of 2026-10-15 |
| 2021-09-01 | Assignment Assignment of assignor's interest | FORMFACTOR BEAVERTON, INC. signed 2021-08-26 | FORMFACTOR, INC. LIVERMORE, CA | 57393/609 | PASDL, file of 2026-10-15 |
| 2018-07-18 | Name change Change of name | CASCADE MICROTECH, INC. signed 2018-05-14 | FORMFACTOR BEAVERTON, INC. BEAVERTON, OR | 46573/664 | PASDL, file of 2026-10-15 |
| 2016-07-12 | Security interest Security interest Security interest in united states patents and trademarks | FORMFACTOR, INC. signed 2016-06-24 ASTRIA SEMICONDUCTOR HOLDINGS, INC. signed 2016-06-24 CASCADE MICROTECH, INC. signed 2016-06-24 MICRO-PROBE INCORPORATED signed 2016-06-24 | HSBC BANK USA, NATIONAL ASSOCIATION SAN FRANCISCO, CA | 39184/280 | PASDL, file of 2026-10-15 |
| 2014-11-06 | Merger Merger | SUSS MICROTEC TEST SYSTEMS GMBH signed 2010-01-27 | CASCADE MICROTECH, INC. BEAVERTON, OR | 34179/359 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.