Patents

US 9202898 B2: Fabricating VTFT with polymer core

Granted
2015-12-01
Filed
2014-03-06 application 14198630
Type
Utility · 19 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

Fabricating a vertical transistor includes providing a structural polymer layer on a substrate. A patterned inorganic thin film is formed on the structural polymer layer, leaving exposed portions of the structural polymer layer not under the inorganic thin film. Exposed portions of the structural polymer layer and portions of the structural polymer layer between the patterned inorganic thin film and the substrate are removed to form a structural polymer post having an inorganic cap that extends beyond an edge of the structural polymer post defining a reentrant profile. A conformal conductive gate layer and a conformal dielectric layer on the gate layer are formed in the reentrant profile. A conformal semiconductor layer is formed on the dielectric layer. First and second electrodes are formed in contact with a first portion (over the cap) and a second portion (not over the post) of the semiconductor layer.

Source: PVGPATDIS, file of 2026-04-10 (ipg151201.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
EASTMAN KODAK COMPANY 2,417 patentsUS company or organizationRochester, NYEASTMAN KODAK COMPANY Federal lobbying client EXACT high confidence: identical full name and state
EASTMAN KODAK CO SEC filer FUZZY low confidence: same name (legal endings aside), one of each nationally
PVGPATDIS, file of 2026-04-10

Inventors

InventorPlacePatentsPerson pageSource
Carolyn Rae EllingerRochester, NY74PVGPATDIS, file of 2026-04-10
Shelby F. NelsonPittsford, NY63PVGPATDIS, file of 2026-04-10

CPC categories

SubclassCategoryFirst groupSource
H10DInorganic electric semiconductor devicesH10D99/00PVGPATDIS, file of 2026-04-10
H01LSemiconductor devices not covered by class h10H01L21/467PVGPATDIS, file of 2026-04-10
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h10H10P14/2922PVGPATDIS, file of 2026-04-10

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

RecordedWhatFromToReel/frameSource
2021-03-04Security interest Security interest
Notice of security interests
EASTMAN KODAK COMPANY signed 2021-02-26BANK OF AMERICA, N.A., AS AGENT BOSTON, MA56984/1PASDL, file of 2026-10-15
2021-03-04Security interest Security interest
Intellectual property security agreement
EASTMAN KODAK COMPANY signed 2021-02-26ALTER DOMUS (US) LLC CHICAGO, IL56734/233PASDL, file of 2026-10-15
2021-03-04Security interest Security interest
Intellectual property security agreement
EASTMAN KODAK COMPANY signed 2021-02-26ALTER DOMUS (US) LLC CHICAGO, IL56734/1PASDL, file of 2026-10-15
2021-03-04Security interest Security interest
Intellectual property security agreement
EASTMAN KODAK COMPANY signed 2021-02-26ALTER DOMUS (US) LLC CHICAGO, IL56733/681PASDL, file of 2026-10-15
2020-01-24Release of security interest
Release of security interest
BARCLAYS BANK PLC signed 2017-02-02EASTMAN KODAK COMPANY ROCHESTER, NY
FAR EAST DEVELOPMENT LTD. ROCHESTER, NY
FPC INC. ROCHESTER, NY
KODAK (NEAR EAST) INC. ROCHESTER, NY
KODAK AMERICAS LTD. ROCHESTER, NY
KODAK REALTY INC. ROCHESTER, NY
LASER PACIFIC MEDIA CORPORATION ROCHESTER, NY
QUALEX INC. ROCHESTER, NY
KODAK PHILIPPINES LTD. ROCHESTER, NY
NPEC INC. ROCHESTER, NY
52773/1PASDL, file of 2026-10-15
2019-07-30Release of security interest
Release of security interest
JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT signed 2019-06-17EASTMAN KODAK COMPANY ROCHESTER, NY
FAR EAST DEVELOPMENT LTD. ROCHESTER, NY
PFC, INC. ROCHESTER, NY
KODAK (NEAR EAST), INC. ROCHESTER, NY
KODAK AMERICAS, LTD. ROCHESTER, NY
KODAK IMAGING NETWORK, INC. ROCHESTER, NY
KODAK PORTUGUESA LIMITED ROCHESTER, NY
KODAK REALTY, INC. ROCHESTER, NY
LASER PACIFIC MEDIA CORPORATION ROCHESTER, NY
PAKON, INC. ROCHESTER, NY
QUALEX, INC. ROCHESTER, NY
KODAK PHILIPPINES, LTD. ROCHESTER, NY
NPEC, INC. ROCHESTER, NY
CREO MANUFACTURING AMERICA LLC ROCHESTER, NY
KODAK AVIATION LEASING LLC ROCHESTER, NY
49901/1PASDL, file of 2026-10-15
2019-07-22Release of security interest
Release of security interest
JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT signed 2019-06-17EASTMAN KODAK COMPANY ROCHESTER, NY
FAR EAST DEVELOPMENT LTD. ROCHESTER, NY
FPC, INC. ROCHESTER, NY
KODAK (NEAR EAST), INC. ROCHESTER, NY
KODAK AMERICAS, LTD. ROCHESTER, NY
KODAK IMAGING NETWORK, INC. ROCHESTER, NY
KODAK PORTUGUESA LIMITED ROCHESTER, NY
KODAK REALTY, INC. ROCHESTER, NY
LASER PACIFIC MEDIA CORPORATION ROCHESTER, NY
PAKON, INC. ROCHESTER, NY
QUALEX, INC. ROCHESTER, NY
KODAK PHILIPPINES, LTD. ROCHESTER, NY
NPEC, INC. ROCHESTER, NY
CREO MANUFACTURING AMERICA LLC ROCHESTER, NY
KODAK AVIATION LEASING LLC ROCHESTER, NY
50239/1PASDL, file of 2026-10-15
2014-03-28Security interest Security interest
Security interest
EASTMAN KODAK COMPANY signed 2014-03-19
FAR EAST DEVELOPMENT LTD. signed 2014-03-19
FPC INC. signed 2014-03-19
KODAK (NEAR EAST), INC. signed 2014-03-19
KODAK AMERICAS, LTD. signed 2014-03-19
KODAK IMAGING NETWORK, INC. signed 2014-03-19
KODAK PORTUGUESA LIMITED signed 2014-03-19
KODAK REALTY, INC. signed 2014-03-19
LASER-PACIFIC MEDIA CORPORATION signed 2014-03-19
QUALEX INC. signed 2014-03-19
KODAK PHILIPPINES, LTD. signed 2014-03-19
NPEC INC. signed 2014-03-19
KODAK AVIATION LEASING LLC signed 2014-03-19
BARCLAYS BANK PLC, AS ADMINISTRATIVE AGENT NEW YORK, NY32553/398PASDL, file of 2026-10-15
2014-03-28Security interest Security interest
Security interest
EASTMAN KODAK COMPANY signed 2014-03-19
FAR EAST DEVELOPMENT LTD. signed 2014-03-19
FPC INC. signed 2014-03-19
KODAK (NEAR EAST), INC. signed 2014-03-19
KODAK AMERICAS, LTD. signed 2014-03-19
KODAK IMAGING NETWORK, INC. signed 2014-03-19
KODAK PORTUGUESA LIMITED signed 2014-03-19
KODAK REALTY, INC. signed 2014-03-19
LASER-PACIFIC MEDIA CORPORATION signed 2014-03-19
QUALEX INC. signed 2014-03-19
KODAK PHILIPPINES, LTD. signed 2014-03-19
NPEC INC. signed 2014-03-19
KODAK AVIATION LEASING LLC signed 2014-03-19
BANK OF AMERICA N.A., AS AGENT BOSTON, MA32553/152PASDL, file of 2026-10-15
2014-03-28Security interest Security interest
Security interest
EASTMAN KODAK COMPANY signed 2014-03-19
FAR EAST DEVELOPMENT LTD. signed 2014-03-19
FPC INC. signed 2014-03-19
KODAK (NEAR EAST). INC. signed 2014-03-19
KODAK AMERICAS, LTD. signed 2014-03-19
KODAK IMAGING NETWORK, INC. signed 2014-03-19
KODAK PORTUGUESA LIMITED signed 2014-03-19
KODAK REALTY, INC. signed 2014-03-19
LASER-PACIFIC MEDIA CORPORATION signed 2014-03-19
QUALEX INC. signed 2014-03-19
KODAK PHILIPPINES, LTD. signed 2014-03-19
NPEC INC. signed 2014-03-19
KODAK AVIATION LEASING LLC signed 2014-03-19
JPMORGAN CHASE BANK, N.A. AS ADMINISTRATIVE AGENT NEWARK, DE32552/741PASDL, file of 2026-10-15
2014-03-06Assignment
Assignment of assignor's interest
ELLINGER, CAROLYN RAE signed 2014-03-03
NELSON, SHELBY FORRESTER signed 2014-03-03
EASTMAN KODAK COMPANY ROCHESTER, NY32363/956ECORSEXC, file of 2026-09-25

Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.

USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.