Patents
US 9142647 B1: VTFT formation using selective area deposition
- Granted
- 2015-09-22
- Filed
- 2014-03-06 application 14198636
- Type
- Utility · 11 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A method of producing a vertical transistor includes providing a conductive gate structure having a reentrant profile on a substrate. A conformal insulating material layer is formed on the conductive gate structure. A conformal semiconductor material layer is formed on the insulating material layer. A deposition inhibiting material is deposited over a portion of the substrate and the conductive gate structure including filling the reentrant profile. A portion of the deposition inhibiting material is removed without removing all of the deposition inhibiting material from the reentrant profile. A plurality of electrodes is formed by depositing an electrically conductive material layer on portions of the semiconductor material layer using a selective area deposition process in which the electrically conductive material layer is not deposited on the deposition inhibiting material remaining in the reentrant profile.
Source: PVGPATDIS, file of 2026-04-10 (ipg150922.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| EASTMAN KODAK COMPANY 2,417 patents | US company or organization | Rochester, NY | EASTMAN KODAK COMPANY Federal lobbying client EXACT high confidence: identical full name and state EASTMAN KODAK CO SEC filer FUZZY low confidence: same name (legal endings aside), one of each nationally | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Shelby F. Nelson | Pittsford, NY | 63 | PVGPATDIS, file of 2026-04-10 | |
| Carolyn Rae Ellinger | Rochester, NY | 74 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H10D | Inorganic electric semiconductor devices | H10D30/031 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2021-03-04 | Security interest Security interest Notice of security interests | EASTMAN KODAK COMPANY signed 2021-02-26 | BANK OF AMERICA, N.A., AS AGENT BOSTON, MA | 56984/1 | PASDL, file of 2026-10-15 |
| 2021-03-04 | Security interest Security interest Intellectual property security agreement | EASTMAN KODAK COMPANY signed 2021-02-26 | ALTER DOMUS (US) LLC CHICAGO, IL | 56734/233 | PASDL, file of 2026-10-15 |
| 2021-03-04 | Security interest Security interest Intellectual property security agreement | EASTMAN KODAK COMPANY signed 2021-02-26 | ALTER DOMUS (US) LLC CHICAGO, IL | 56734/1 | PASDL, file of 2026-10-15 |
| 2021-03-04 | Security interest Security interest Intellectual property security agreement | EASTMAN KODAK COMPANY signed 2021-02-26 | ALTER DOMUS (US) LLC CHICAGO, IL | 56733/681 | PASDL, file of 2026-10-15 |
| 2020-01-24 | Release of security interest Release of security interest | BARCLAYS BANK PLC signed 2017-02-02 | EASTMAN KODAK COMPANY ROCHESTER, NY FAR EAST DEVELOPMENT LTD. ROCHESTER, NY FPC INC. ROCHESTER, NY KODAK (NEAR EAST) INC. ROCHESTER, NY KODAK AMERICAS LTD. ROCHESTER, NY KODAK REALTY INC. ROCHESTER, NY LASER PACIFIC MEDIA CORPORATION ROCHESTER, NY QUALEX INC. ROCHESTER, NY KODAK PHILIPPINES LTD. ROCHESTER, NY NPEC INC. ROCHESTER, NY | 52773/1 | PASDL, file of 2026-10-15 |
| 2019-07-30 | Release of security interest Release of security interest | JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT signed 2019-06-17 | EASTMAN KODAK COMPANY ROCHESTER, NY FAR EAST DEVELOPMENT LTD. ROCHESTER, NY PFC, INC. ROCHESTER, NY KODAK (NEAR EAST), INC. ROCHESTER, NY KODAK AMERICAS, LTD. ROCHESTER, NY KODAK IMAGING NETWORK, INC. ROCHESTER, NY KODAK PORTUGUESA LIMITED ROCHESTER, NY KODAK REALTY, INC. ROCHESTER, NY LASER PACIFIC MEDIA CORPORATION ROCHESTER, NY PAKON, INC. ROCHESTER, NY QUALEX, INC. ROCHESTER, NY KODAK PHILIPPINES, LTD. ROCHESTER, NY NPEC, INC. ROCHESTER, NY CREO MANUFACTURING AMERICA LLC ROCHESTER, NY KODAK AVIATION LEASING LLC ROCHESTER, NY | 49901/1 | PASDL, file of 2026-10-15 |
| 2019-07-22 | Release of security interest Release of security interest | JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT signed 2019-06-17 | EASTMAN KODAK COMPANY ROCHESTER, NY FAR EAST DEVELOPMENT LTD. ROCHESTER, NY FPC, INC. ROCHESTER, NY KODAK (NEAR EAST), INC. ROCHESTER, NY KODAK AMERICAS, LTD. ROCHESTER, NY KODAK IMAGING NETWORK, INC. ROCHESTER, NY KODAK PORTUGUESA LIMITED ROCHESTER, NY KODAK REALTY, INC. ROCHESTER, NY LASER PACIFIC MEDIA CORPORATION ROCHESTER, NY PAKON, INC. ROCHESTER, NY QUALEX, INC. ROCHESTER, NY KODAK PHILIPPINES, LTD. ROCHESTER, NY NPEC, INC. ROCHESTER, NY CREO MANUFACTURING AMERICA LLC ROCHESTER, NY KODAK AVIATION LEASING LLC ROCHESTER, NY | 50239/1 | PASDL, file of 2026-10-15 |
| 2014-03-28 | Security interest Security interest Security interest | EASTMAN KODAK COMPANY signed 2014-03-19 FAR EAST DEVELOPMENT LTD. signed 2014-03-19 FPC INC. signed 2014-03-19 KODAK (NEAR EAST), INC. signed 2014-03-19 KODAK AMERICAS, LTD. signed 2014-03-19 KODAK IMAGING NETWORK, INC. signed 2014-03-19 KODAK PORTUGUESA LIMITED signed 2014-03-19 KODAK REALTY, INC. signed 2014-03-19 LASER-PACIFIC MEDIA CORPORATION signed 2014-03-19 QUALEX INC. signed 2014-03-19 KODAK PHILIPPINES, LTD. signed 2014-03-19 NPEC INC. signed 2014-03-19 KODAK AVIATION LEASING LLC signed 2014-03-19 | BARCLAYS BANK PLC, AS ADMINISTRATIVE AGENT NEW YORK, NY | 32553/398 | PASDL, file of 2026-10-15 |
| 2014-03-28 | Security interest Security interest Security interest | EASTMAN KODAK COMPANY signed 2014-03-19 FAR EAST DEVELOPMENT LTD. signed 2014-03-19 FPC INC. signed 2014-03-19 KODAK (NEAR EAST), INC. signed 2014-03-19 KODAK AMERICAS, LTD. signed 2014-03-19 KODAK IMAGING NETWORK, INC. signed 2014-03-19 KODAK PORTUGUESA LIMITED signed 2014-03-19 KODAK REALTY, INC. signed 2014-03-19 LASER-PACIFIC MEDIA CORPORATION signed 2014-03-19 QUALEX INC. signed 2014-03-19 KODAK PHILIPPINES, LTD. signed 2014-03-19 NPEC INC. signed 2014-03-19 KODAK AVIATION LEASING LLC signed 2014-03-19 | BANK OF AMERICA N.A., AS AGENT BOSTON, MA | 32553/152 | PASDL, file of 2026-10-15 |
| 2014-03-28 | Security interest Security interest Security interest | EASTMAN KODAK COMPANY signed 2014-03-19 FAR EAST DEVELOPMENT LTD. signed 2014-03-19 FPC INC. signed 2014-03-19 KODAK (NEAR EAST). INC. signed 2014-03-19 KODAK AMERICAS, LTD. signed 2014-03-19 KODAK IMAGING NETWORK, INC. signed 2014-03-19 KODAK PORTUGUESA LIMITED signed 2014-03-19 KODAK REALTY, INC. signed 2014-03-19 LASER-PACIFIC MEDIA CORPORATION signed 2014-03-19 QUALEX INC. signed 2014-03-19 KODAK PHILIPPINES, LTD. signed 2014-03-19 NPEC INC. signed 2014-03-19 KODAK AVIATION LEASING LLC signed 2014-03-19 | JPMORGAN CHASE BANK, N.A. AS ADMINISTRATIVE AGENT NEWARK, DE | 32552/741 | PASDL, file of 2026-10-15 |
| 2014-03-06 | Assignment Assignment of assignor's interest | ELLINGER, CAROLYN RAE signed 2014-03-03 NELSON, SHELBY FORRESTER signed 2014-03-03 | EASTMAN KODAK COMPANY ROCHESTER, NY | 32362/244 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.