Patents
US 9086358 B2: Test cell
- Granted
- 2015-07-21
- Filed
- 2014-03-17 application 14215494
- Type
- Utility · 4 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A test cell for analyzing residue on the surface of a microelectronic component includes a cleaning tip with an opening at one end for passing cleaning fluid into the chamber and for passing used cleaning fluid out of the chamber, and an opening at the other end to access a test area in which cleaning fluid may contact the surface of a component to be tested. A third opening for venting the cleaning tip chamber to the atmosphere may also be provided. A common cleaning/aspiration passageway communicates with the cleaning tip chamber through the first opening. A cleaning passageway provides fresh cleaning fluid to the cleaning/aspiration passageway. An aspiration passageway removes used cleaning fluid from the cleaning/aspiration passageway. An analysis chamber in fluid communication with the aspiration passageway has electrodes effective for qualitatively and/or quantitatively measuring residue removed from the microelectronic surface by the cleaning fluid.
Source: PVGPATDIS, file of 2026-04-10 (ipg150721.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Foresite, Inc. 4 patents | US company or organization | Kokomo, IN | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Terry L. Munson | Kokomo, IN | 4 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01N | Investigating or analysing materials by determining their chemical or physical properties | G01N27/08 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2014-09-10 | Assignment Assignment of assignor's interest | MUNSON, TERRY L. signed 2014-09-09 | FORESITE, INC. KOKOMO, IN | 33707/654 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.