Patents
US 9059104 B2: Process for selectively removing nitride from substrates
- Granted
- 2015-06-16
- Filed
- 2011-12-06 application 13312148
- Type
- Utility · 26 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A method of selectively removing silicon nitride from a substrate comprises providing a substrate having silicon nitride on a surface thereof; and dispensing phosphoric acid and sulfuric acid onto the surface of the substrate as a mixed acid liquid stream at a temperature greater than about 150° C. In this method, water is added to a liquid solution of the mixed acid liquid stream as or after the liquid solution of the mixed acid liquid stream passes through a nozzle.
Source: PVGPATDIS, file of 2026-04-10 (ipg150616.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| TEL FSI, INC. 34 patents | US company or organization | Chaska, MN | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Anthony S. Ratkovich | Edina, MN | 3 | PVGPATDIS, file of 2026-04-10 | |
| Jeffery W. Butterbaugh | Eden Prairie, MN | 14 | PVGPATDIS, file of 2026-04-10 | |
| David S. Becker | Excelsior, MN | 10 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H01L | Semiconductor devices not covered by class h10 | H01L21/31111 | PVGPATDIS, file of 2026-04-10 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P50/283 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2020-07-30 | Correction Conversion | TEL FSI, INC. signed 2019-12-31 | TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC. CHASKA, MN | 53366/139 | PASDL, file of 2026-10-15 |
| 2013-01-11 | Merger Merger, change of name | FSI INTERNATIONAL, INC. signed 2012-10-11 RB MERGER CORPORATION signed 2012-10-11 | TEL FSI, INC. CHASKA, MN | 29618/179 | PASDL, file of 2026-10-15 |
| 2012-02-16 | Assignment Assignment of assignor's interest | BECKER, DAVID SCOTT signed 2012-01-04 BUTTERBAUGH, JEFFERY W. signed 2012-01-04 RATKOVICH, ANTHONY S. signed 2012-01-05 | FSI INTERNATIONAL, INC. CHASKA, MN | 27718/728 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.