Patents
US 9039840 B2: Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
- Granted
- 2015-05-26
- Filed
- 2013-04-01 application 13854493
- Type
- Utility · 5 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
Strategies for tool designs and their uses wherein the tools can operate in either closed or open modes of operation. The tools easily transition between open and closed modes on demand. According to one general strategy, environmentally controlled pathway(s) couple the ambient to one or more process chambers. Air amplification capabilities upstream from the process chamber(s) allow substantial flows of air to be introduced into the process chamber(s) on demand. Alternatively, the fluid pathways are easily closed, such as by simple valve actuation, to block egress to the ambient through these pathways. Alternative flows of nonambient fluids can then be introduced into the process chamber(s) via pathways that are at least partially in common with the pathways used for ambient air introduction. In other strategies, gap(s) between moveable components are sealed at least with flowing gas curtains rather than by relying only upon direct physical contact for sealing.
Source: PVGPATDIS, file of 2026-04-10 (ipg150526.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| TEL FSI, INC. 34 patents | US company or organization | Chaska, MN | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Jeffrey M. Lauerhaas | Waconia, MN | 5 | PVGPATDIS, file of 2026-04-10 | |
| Jimmy D. Collins | Allen, TX | 11 | PVGPATDIS, file of 2026-04-10 | |
| Tracy A. Gast | Waconia, MN | 10 | PVGPATDIS, file of 2026-04-10 | |
| Alan D. Rose | Wylie, TX | 13 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H01L | Semiconductor devices not covered by class h10 | H01L21/67017 | PVGPATDIS, file of 2026-04-10 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/0402 | PVGPATDIS, file of 2026-04-10 |
| Y10S | Technical subjects covered by former uspc cross-reference art collections [xracs] and digests | Y10S134/902 | PVGPATDIS, file of 2026-04-10 |
| Y10T | Technical subjects covered by former us classification | Y10T137/0363 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2020-07-30 | Correction Conversion | TEL FSI, INC. signed 2019-12-31 | TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC. CHASKA, MN | 53366/139 | PASDL, file of 2026-10-15 |
| 2015-01-30 | Merger Merger and change of name | RB MERGER CORP. signed 2012-10-11 FSI INTERNATIONAL, INC. signed 2012-10-11 FSI INTERNATIONAL, INC. signed 2012-10-11 | TEL FSI, INC. MINNEAPOLIS, MN | 34854/524 | PASDL, file of 2026-10-15 |
| 2015-01-30 | Assignment Assignment of assignor's interest | LAUERHAAS, JEFFREY M. signed 2009-06-15 COLLINS, JIMMY D. signed 2009-06-21 GAST, TRACY A. signed 2009-06-17 ROSE, ALAN D. signed 2009-06-22 | FSI INTERNATIONAL, INC. CHASKA, MN | 34854/128 | PASDL, file of 2026-10-15 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.