Patents
US 8680879 B2: Chuck for supporting and retaining a test substrate and a calibration substrate
- Granted
- 2014-03-25
- Filed
- 2011-08-12 application 13209171
- Type
- Utility · 23 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A chuck for supporting and retaining a test substrate includes a device for supporting and retaining a calibration substrate. The chuck comprises a first support surface for supporting a test substrate and a second support surface, which is laterally offset to the first support surface, for supporting a calibration substrate. The calibration substrate has planar calibration standards for calibration of a measuring unit of a prober, and dielectric material or air situated below the calibration substrate at least in the area of the calibration standard. In order to be able to take the actual thermal conditions on the test substrate and in particular also on known and unknown calibration standards and thus the thermal influence on the electrical behavior of the calibration standard used into consideration, the second support surface is equipped for temperature control of the calibration substrate.
Source: PVGPATDIS, file of 2026-04-10 (ipg140325.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Cascade Microtech, Inc. 96 patents | US company or organization | Beaverton, OR | CASCADE MICROTECH INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Andrej Rumiantsev | Dresden, DE | 6 | PVGPATDIS, file of 2026-04-10 | |
| Stojan Kanev | Ortrand, DE | 36 | PVGPATDIS, file of 2026-04-10 | |
| Steffen Schott | Dresden, DE | 11 | PVGPATDIS, file of 2026-04-10 | |
| Karsten Stoll | Wilthen, DE | 9 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01R | Measuring electric variables; measuring magnetic variables | G01R31/2886 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2025-08-07 | Release of security interest Release of security interest | HSBC BANK USA, NATIONAL ASSOCIATION signed 2025-08-06 | FORMFACTOR, INC. LIVERMORE, CA | 72853/1 | PASDL, file of 2026-10-15 |
| 2025-07-29 | Security interest Security interest Security interest | FORMFACTOR, INC. signed 2025-07-29 | WELLS FARGO BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT SAN ANTONIO, TX | 72263/272 | PASDL, file of 2026-10-25 |
| 2021-09-01 | Assignment Assignment of assignor's interest | FORMFACTOR BEAVERTON, INC. signed 2021-08-26 | FORMFACTOR, INC. LIVERMORE, CA | 57393/609 | PASDL, file of 2026-10-15 |
| 2018-07-18 | Name change Change of name | CASCADE MICROTECH, INC. signed 2018-05-14 | FORMFACTOR BEAVERTON, INC. BEAVERTON, OR | 46573/664 | PASDL, file of 2026-10-15 |
| 2016-07-12 | Security interest Security interest Security interest in united states patents and trademarks | FORMFACTOR, INC. signed 2016-06-24 ASTRIA SEMICONDUCTOR HOLDINGS, INC. signed 2016-06-24 CASCADE MICROTECH, INC. signed 2016-06-24 MICRO-PROBE INCORPORATED signed 2016-06-24 | HSBC BANK USA, NATIONAL ASSOCIATION SAN FRANCISCO, CA | 39184/280 | PASDL, file of 2026-10-15 |
| 2012-08-16 | Merger Merger | SUSS MICROTEC TESTSYSTEMS (GMBH) signed 2010-01-27 | CASCADE MICROTECH, INC. BEAVERTON, OR | 28800/596 | PASDL, file of 2026-10-15 |
| 2012-08-16 | Assignment Assignment of assignor's interest | RUMIANTSEV, ANDREJ signed 2009-07-28 KANEV, STOJAN signed 2009-07-16 SCHOTT, STEFFEN signed 2009-07-16 STOLL, KARSTEN signed 2009-08-04 | SUSS MICROTEC TESTSYSTEMS (GMBH) DRESDEN | 28800/503 | PASDL, file of 2026-10-15 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.