Patents
US 8072586 B2: Arrangement and method for focusing a multiplane image acquisition on a prober
- Granted
- 2011-12-06
- Filed
- 2010-07-30 application 12847723
- Type
- Utility · 4 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A focused multi-planar image acquisition in real time even while a test object is moving, is achieved with a system and a method for a focused multi-planar image acquisition in a prober. When a surface of a test object is positioned laterally in relation to tips of separated probe needles, a microscope is focused on the surface of the test object at a first time and on a plane of the probe needles at a second time. The objective lens is provided with a microscope objective lens focusing system, which can focus the objective lens, independently of a vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.
Source: PVGPATDIS, file of 2026-04-10 (ipg111206.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Cascade Microtech, Inc. 96 patents | US company or organization | Beaverton, OR | CASCADE MICROTECH INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Michael Teich | Bad Marienberg, DE | 16 | PVGPATDIS, file of 2026-04-10 | |
| Ulf Hackius | Dresden, DE | 3 | PVGPATDIS, file of 2026-04-10 | |
| Juliane Busch | Dresden, DE | 1 | PVGPATDIS, file of 2026-04-10 | |
| Joerg Kiesewetter | Ortrand, DE | 4 | PVGPATDIS, file of 2026-04-10 | |
| Axel Becker | Dresden, DE | 21 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G02B | Optical elements, systems or apparatus | G02B21/365 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2025-08-07 | Release of security interest Release of security interest | HSBC BANK USA, NATIONAL ASSOCIATION signed 2025-08-06 | FORMFACTOR, INC. LIVERMORE, CA | 72853/1 | PASDL, file of 2026-10-15 |
| 2021-09-01 | Assignment Assignment of assignor's interest | FORMFACTOR BEAVERTON, INC. signed 2021-08-26 | FORMFACTOR, INC. LIVERMORE, CA | 57393/609 | PASDL, file of 2026-10-15 |
| 2018-07-18 | Name change Change of name | CASCADE MICROTECH, INC. signed 2018-05-14 | FORMFACTOR BEAVERTON, INC. BEAVERTON, OR | 46573/664 | PASDL, file of 2026-10-15 |
| 2016-07-12 | Security interest Security interest Security interest in united states patents and trademarks | FORMFACTOR, INC. signed 2016-06-24 ASTRIA SEMICONDUCTOR HOLDINGS, INC. signed 2016-06-24 CASCADE MICROTECH, INC. signed 2016-06-24 MICRO-PROBE INCORPORATED signed 2016-06-24 | HSBC BANK USA, NATIONAL ASSOCIATION SAN FRANCISCO, CA | 39184/280 | PASDL, file of 2026-10-15 |
| 2011-05-09 | Merger Merger | SUSS MICROTEC TEST SYSTEMS GMBH signed 2010-01-27 | CASCADE MICROTECH, INC. BEAVERTON, OR | 26246/706 | PASDL, file of 2026-10-15 |
| 2011-02-16 | Assignment Assignment of assignor's interest | BECKER, AXEL signed 2008-04-08 KIESEWETTER, JOERG signed 2008-04-08 BUSCH, JULIANE signed 2008-04-09 HACKIUS, ULF signed 2008-04-09 TEICH, MICHAEL signed 2008-04-09 | SUSS MICROTEC TEST SYSTEMS GMBH SACKA | 25814/977 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.