Patents
US 7573283 B2: Method for measurement of a device under test
- Granted
- 2009-08-11
- Filed
- 2007-06-19 application 11765019
- Type
- Utility · 15 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.
Source: PVGPATDIS, file of 2026-04-10 (ipg090811.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| SUSS MicroTec Test Systems GmbH 11 patents | Foreign company or organization | Sacka, DE | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Axel Schmidt | Stölpchen, DE | 31 | PVGPATDIS, file of 2026-04-10 | |
| Frank Fehrmann | Großenhain, DE | 7 | PVGPATDIS, file of 2026-04-10 | |
| Ulf Hackius | Dresden, DE | 3 | PVGPATDIS, file of 2026-04-10 | |
| Stojan Kanev | Sacka, DE | 36 | PVGPATDIS, file of 2026-04-10 | |
| Steffen Laube | Senftenberg - Zły Komorow, DE | 1 | PVGPATDIS, file of 2026-04-10 | |
| Jorg Kiesewetter | Thiendorf, DE | 9 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01R | Measuring electric variables; measuring magnetic variables | G01R31/2891 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2025-08-07 | Release of security interest Release of security interest | HSBC BANK USA, NATIONAL ASSOCIATION signed 2025-08-06 | FORMFACTOR, INC. LIVERMORE, CA | 72853/1 | PASDL, file of 2026-10-15 |
| 2025-07-29 | Security interest Security interest Security interest | FORMFACTOR, INC. signed 2025-07-29 | WELLS FARGO BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT SAN ANTONIO, TX | 72263/272 | PASDL, file of 2026-10-25 |
| 2021-09-01 | Assignment Assignment of assignor's interest | FORMFACTOR BEAVERTON, INC. signed 2021-08-26 | FORMFACTOR, INC. LIVERMORE, CA | 57393/609 | PASDL, file of 2026-10-15 |
| 2018-07-18 | Name change Change of name | CASCADE MICROTECH, INC. signed 2018-05-14 | FORMFACTOR BEAVERTON, INC. BEAVERTON, OR | 46573/664 | PASDL, file of 2026-10-15 |
| 2016-07-12 | Security interest Security interest Security interest in united states patents and trademarks | FORMFACTOR, INC. signed 2016-06-24 ASTRIA SEMICONDUCTOR HOLDINGS, INC. signed 2016-06-24 CASCADE MICROTECH, INC. signed 2016-06-24 MICRO-PROBE INCORPORATED signed 2016-06-24 | HSBC BANK USA, NATIONAL ASSOCIATION SAN FRANCISCO, CA | 39184/280 | PASDL, file of 2026-10-15 |
| 2011-05-09 | Merger Merger | SUSS MICROTEC TEST SYSTEMS GMBH signed 2010-01-27 | CASCADE MICROTECH, INC. BEAVERTON, OR | 26246/706 | PASDL, file of 2026-10-15 |
| 2007-09-19 | Assignment Assignment of assignor's interest | LAUBE, STEFFEN signed 2007-08-01 KANEV, STOJAN signed 2007-08-16 FEHRMANN, FRANK signed 2007-08-22 SCHMIDT, AXEL signed 2007-08-22 KIESEWETTER, JORG signed 2007-08-29 HACKIUS, ULF signed 2007-09-03 | SUSS MICROTEC TEST SYSTEMS GMBH SACKA | 19846/213 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.