Patents
US 7395698 B2: Three-dimensional nanoscale metrology using FIRAT probe
- Granted
- 2008-07-08
- Filed
- 2006-10-24 application 11552274
- Type
- Utility · 48 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance over a selected portion of the gap, the change in distance at the selected portion orienting a probe tip of the force sensor for multi-directional measurement.
Source: PVGPATDIS, file of 2026-04-10 (ipg080708.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Georgia Institute of Technology 4 patents | US company or organization | Atlanta, GA | Georgia Institute of Technology-Main Campus College or university EXACT high confidence: through the nonprofit with the college's EIN (identical full name and state) GEORGIA INSTITUTE OF TECHNOLOGY Nonprofit EXACT high confidence: identical full name and state | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Fahrettin Levent Degertekin | Decatur, GA | 18 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01Q | Scanning-probe techniques or apparatus; applications of scanning-probe techniques, e.g. scanning probe microscopy [spm] | G01Q20/02 | PVGPATDIS, file of 2026-04-10 |
| B82Y | Specific uses or applications of nanostructures; measurement or analysis of nanostructures; manufacture or treatment of nanostructures | B82Y35/00 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2007-01-25 | Assignment Assignment of assignor's interest | DEGERTEKIN, FAHRETTIN L signed 2007-01-24 | GEORGIA TECH RESEARCH CORPORATION ATLANTA, GA | 18805/937 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.