Patents
US 12772802 B2: End-point detection for backside metal thickness control
- Granted
- 2026-10-20
- Filed
- 2022-12-14 application 18081394
- Type
- Utility · 10 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A method of controlling the thickness of a layer of material applied to a surface, where the surface has one or more bodies of another material disposed therein, the another material being significantly harder than the first mentioned material, the one or more bodies of another material being disposed on the surface before the layer of material is applied to the surface, the layer of material when applied to the surface having a sufficient thickness to cover the one or more bodies of the another material, the layer of material then being mechanically reduced in thickness, such as by polishing, to expose at least a portion of the one or more bodies of the another material.
Source: PTBLXML, file of 2026-10-20 (ipgb20261020.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| HRL LABORATORIES, LLC 1,601 patents | US company or organization | Malibu, CA | PTBLXML, file of 2026-10-20 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Florian G. Herrault | Agoura Hills, CA | 44 | PTBLXML, file of 2026-10-20 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P74/238 | PTBLXML, file of 2026-10-20 |
| H10W | Generic packages, interconnections, connectors or other constructional details of devices covered by class h10 | H10W46/00 | PTBLXML, file of 2026-10-20 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.