Patents
US 12768798 B2: Polarized imaging reflectometer
- Granted
- 2026-10-20
- Filed
- 2024-05-31 application 18731195
- Type
- Utility · 17 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
Embodiments described herein relate to an apparatus that includes a light engine with a plurality of light sources. In an embodiment, each of the plurality of light sources is configured to emit a spectral band with different wavelength bandwidth. The apparatus may also include a beam splitter that is optically coupled to the light engine, where the beam splitter splits the spectral bands into a first optical path and a second optical path. In an embodiment, a power monitor is optically coupled to the beam splitter along the first optical path, and a reflective objective lens is optically coupled to the beam splitter along the second optical path. In an embodiment, the reflective objective lens includes a first mirror and a second mirror. In an embodiment, the apparatus further includes an optical sensor configured to measure the spectral bands after the spectral bands have reflected off of a substrate.
Source: PTBLXML, file of 2026-10-20 (ipgb20261020.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Applied Materials, Inc. 9,683 patents | US company or organization | Santa Clara, CA | PTBLXML, file of 2026-10-20 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Eric Chin Hong Ng | Livermore, CA | PTBLXML, file of 2026-10-20 | ||
| Todd Egan | Fremont, CA | 72 | PTBLXML, file of 2026-10-20 | |
| Mehdi Vaez-Iravani | Santa Clara, CA | 73 | PTBLXML, file of 2026-10-20 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01N | Investigating or analysing materials by determining their chemical or physical properties | G01N21/9501 | PTBLXML, file of 2026-10-20 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.