Patents
US 12768690 B2: Variably choked pressure rate-of-rise mass flow verifier
- Granted
- 2026-10-20
- Filed
- 2025-04-15 application 19179974
- Type
- Utility · 20 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A method includes opening a flow path from a gas stick through a variable orifice, a chamber, and an outlet isolation valve of the chamber. The method further includes causing a gas to flow through the flow path at a flow rate setpoint. The method further includes actuating an opening of the variable orifice to establish a choked pressure regime within the chamber, the choked pressure regime being achieved by causing a first pressure upstream of the variable orifice to be at least two times a second pressure downstream of the variable orifice. The method further includes closing the outlet isolation valve to cause the chamber to be filled with the gas from the gas stick. The method further includes measuring a pressure rate-of-rise within the chamber. The method further includes determining one or more flow measurements based at least in part on the pressure rate-of-rise.
Source: PTBLXML, file of 2026-10-20 (ipgb20261020.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Applied Materials, Inc. 9,683 patents | US company or organization | Santa Clara, CA | PTBLXML, file of 2026-10-20 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Ashley Okada | San Jose, CA | PTBLXML, file of 2026-10-20 | ||
| Ming Xu | San Jose, CA | 53 | PTBLXML, file of 2026-10-20 | |
| Srikanth Krishnamurthy | Banglore, IN | 5 | PTBLXML, file of 2026-10-20 | |
| Andreas Johannes Jendrzey | Friedberg, DE | PTBLXML, file of 2026-10-20 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01F | Measuring volume, volume flow, mass flow or liquid level; metering by volume | G01F1/37 | PTBLXML, file of 2026-10-20 |
| G01L | Measuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure | G01L19/0092 | PTBLXML, file of 2026-10-20 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.