Patents
US 12768596 B2: Reflector for process chamber
- Granted
- 2026-10-20
- Filed
- 2023-07-20 application 18355938
- Type
- Utility · 20 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A modular reflective heating system for use in a process chamber is provided. The modular reflective heating system includes: a plurality of connectors; a plurality of lamps, each lamp connected to at least one of the connectors; a reflector including: a base; and a reflective assembly including a first plurality of reflective portions and a second plurality of reflective portions. Each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is connected to the base, and each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is configured to be individually disconnected from the base. The modular reflective heating system further includes a spare reflective portion configured to replace a first reflective portion in the first plurality of reflective portions or the second plurality of reflective portions.
Source: PTBLXML, file of 2026-10-20 (ipgb20261020.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Applied Materials, Inc. 9,683 patents | US company or organization | Santa Clara, CA | PTBLXML, file of 2026-10-20 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Raja Murali Dhamodharan | Madurai, IN | 5 | PTBLXML, file of 2026-10-20 | |
| Shu-Kwan Lau | Sunnyvale, CA | 55 | PTBLXML, file of 2026-10-20 | |
| Shainish Nellikka | Bangalore, IN | 5 | PTBLXML, file of 2026-10-20 | |
| Enle Choo | Saratoga, CA | 13 | PTBLXML, file of 2026-10-20 | |
| Kalaivanan Mohanadass | Santa Clara, CA | PTBLXML, file of 2026-10-20 | ||
| Aniketnitin Patil | San Jose, CA | 5 | PTBLXML, file of 2026-10-20 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| F27B | Furnaces, kilns, ovens or retorts in general; open sintering or like apparatus | F27B17/0025 | PTBLXML, file of 2026-10-20 |
| H05B | Electric heating; electric light sources not otherwise provided for; circuit arrangements for electric light sources, in general | H05B3/0047 | PTBLXML, file of 2026-10-20 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/0436 | PTBLXML, file of 2026-10-20 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.