Patents
US 12768074 B2: Chamber architecture for epitaxial deposition and advanced epitaxial film applications
- Granted
- 2026-10-20
- Filed
- 2024-03-12 application 18602099
- Type
- Utility · 20 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
The present disclosure generally relates to a process chamber for processing of semiconductor substrates. The process chamber includes an upper lamp assembly, a lower lamp assembly, a susceptor, an upper window disposed between the substrate support and the upper lamp assembly, a lower window disposed between the lower lamp assembly and the substrate support, an inject ring, and a base ring. The susceptor includes a movement assembly. The movement assembly includes a bearing feedthrough assembly. The bearing feedthrough assembly is a ferrofluidic feedthrough assembly and functions as a ferrofluidic bearing. The bearing feedthrough assembly includes a shaft coupled to the support shaft. The shaft is rotated within the bearing feedthrough assembly. The bearing feedthrough assembly is combined with a first linear spline and a second linear spline.
Source: PTBLXML, file of 2026-10-20 (ipgb20261020.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Applied Materials, Inc. 9,683 patents | US company or organization | Santa Clara, CA | PTBLXML, file of 2026-10-20 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Tetsuya Ishikawa | San Jose, CA | 157 | PTBLXML, file of 2026-10-20 | |
| Swaminathan T. Srinivasan | Pleasanton, CA | PTBLXML, file of 2026-10-20 | ||
| Kartik Bhupendra Shah | Saratoga, CA | PTBLXML, file of 2026-10-20 | ||
| Ala Moradian | Sunnyvale, CA | 64 | PTBLXML, file of 2026-10-20 | |
| Manjunath Subbanna | Bangalore, IN | 12 | PTBLXML, file of 2026-10-20 | |
| Matthias Bauer | Sunnyvale, CA | 51 | PTBLXML, file of 2026-10-20 | |
| Peter Reimer | Los Altos, CA | 51 | PTBLXML, file of 2026-10-20 | |
| Michael R. Rice | Pleasanton, CA | 142 | PTBLXML, file of 2026-10-20 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| C30B | Single-crystal growth ; unidirectional solidification of eutectic material or unidirectional demixing of eutectoid material; refining by zone-melting of material ; production of a homogeneous polycrystalline material with defined structure ; single crystals or homogeneous polycrystalline material with defined structure; after-treatment of single crystals or a homogeneous polycrystalline material with defined structure ; apparatus therefor | C30B25/14 | PTBLXML, file of 2026-10-20 |
| C23C | Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general | C23C16/4412 | PTBLXML, file of 2026-10-20 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/0436 | PTBLXML, file of 2026-10-20 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.