Patents
US 12757679 B2: Electrostatic chuck and related methods and structures
- Granted
- 2026-10-06
- Filed
- 2022-09-14 application 17944904
- Type
- Utility · 19 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, and electrostatic chuck base components prepared by an additive manufacturing technique.
Source: PTBLXML, file of 2026-10-06 (ipgb20261006.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Entegris, Inc. 666 patents | US company or organization | Billerica, MA | ENTEGRIS, INC. Federal lobbying client EXACT high confidence: identical full name and state ENTEGRIS INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PTBLXML, file of 2026-10-06 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Carlo Waldfried | Middleton, MA | 22 | PTBLXML, file of 2026-10-06 | |
| Jakub Rybczynski | Arlington, MA | 13 | PTBLXML, file of 2026-10-06 | |
| Florentina Popa | Houston, TX | PTBLXML, file of 2026-10-06 | ||
| Murat Yaldizli | Westford, MA | PTBLXML, file of 2026-10-06 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/722 | PTBLXML, file of 2026-10-06 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.