Patents
US 12753198 B2: Precursors containing fluorinated alkoxides and amides
- Granted
- 2026-10-06
- Filed
- 2023-08-31 application 18240873
- Type
- Utility · 14 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
The present disclosure relates to the field of precursors, more specifically precursors containing at least one fluorinated group. In some embodiments, the precursors are hafnium, zirconium, and titanium bis(cyclopentadienyl) precursors containing fluorinated alkoxides and amides. In some embodiments, the present disclosure relates to using precursors for deposition of group 4 containing thin films, such as HfOx, ZrOx, and TiOx film applications. These thin films can be used in a variety of applications including semiconductor device structures. The compounds of the present disclosure have been developed and synthesized to generate compounds that provide improvements in film applications, such as HfOx, ZrOx, and TiOx film applications. The improvements to the compounds of the present disclosure include increased molecule stability at delivery temperature and deposition temperature, improvements related to precursor film impurity levels, molecule volatility, molecule melting point, and step coverage.
Source: PTBLXML, file of 2026-10-06 (ipgb20261006.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Entegris, Inc. 666 patents | US company or organization | Billerica, MA | ENTEGRIS, INC. Federal lobbying client EXACT high confidence: identical full name and state ENTEGRIS INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PTBLXML, file of 2026-10-06 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Drew Michael Hood | Newtown, CT | PTBLXML, file of 2026-10-06 | ||
| Thomas M. Cameron | Newtown, CT | 24 | PTBLXML, file of 2026-10-06 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| C07F | Acyclic, carbocyclic or heterocyclic compounds containing elements other than carbon, hydrogen, halogen, oxygen, nitrogen, sulfur, selenium or tellurium | C07F17/00 | PTBLXML, file of 2026-10-06 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.