Patents
US 12751245 B2: Purge flow distribution system for a substrate container and method for performing the same
- Granted
- 2026-09-29
- Filed
- 2022-10-25 application 17973309
- Type
- Utility · 17 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A substrate container includes a shell defining an interior space and a purge flow distribution system. The shell includes a front opening, a bottom wall, and a rear wall. The purge flow distribution system receives a stream of purge gas and includes an inlet and a network of separate gas distributing devices configured to distribute the stream of purge gas into the interior space. A supply line is also included that is connected to the inlet and configured to divide the supply of purge gas to the network of separate gas distributing devices. A method of purging an open substrate container includes supplying a stream of purge gas to an inlet of a purge flow distribution system and dividing the purge gas to supply a network of separate gas distributing devices to distribute the stream of purge gas into the interior space.
Source: PTBLXML, file of 2026-09-29 (ipgb20260929.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Entegris, Inc. 666 patents | US company or organization | Billerica, MA | ENTEGRIS, INC. Federal lobbying client EXACT high confidence: identical full name and state ENTEGRIS INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PTBLXML, file of 2026-09-29 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Mark V. Smith | Colorado Springs, CO | 22 | PTBLXML, file of 2026-09-29 | |
| Thomas H. Wilkie | Colorado Springs, CO | PTBLXML, file of 2026-09-29 | ||
| Colton J. Harr | Monument, CO | 12 | PTBLXML, file of 2026-09-29 | |
| Matthew A. Fuller | Colorado Springs, CO | 38 | PTBLXML, file of 2026-09-29 | |
| Shawn D. Eggum | Lonsdale, MN | 10 | PTBLXML, file of 2026-09-29 | |
| Michael C. Zabka | New Prague, MN | 8 | PTBLXML, file of 2026-09-29 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/1926 | PTBLXML, file of 2026-09-29 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.