Patents
US 12747160 B2: Method for purifying iodosilanes
- Granted
- 2026-09-29
- Filed
- 2022-04-20 application 17724992
- Type
- Utility · 14 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
Provided is a method for purification of iodosilanes, such as diiodosilane. In this method, trace amounts of certain metal ion contaminants are removed, thus providing certain liquid compositions comprising the iodosilanes, which can be used advantageously in the deposition of silicon-containing films onto microelectronic device substrates.
Source: PTBLXML, file of 2026-09-29 (ipgb20260929.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Entegris, Inc. 666 patents | US company or organization | Billerica, MA | ENTEGRIS, INC. Federal lobbying client EXACT high confidence: identical full name and state ENTEGRIS INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PTBLXML, file of 2026-09-29 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| SungCheol Yoon | Hwaseong-si, KR | PTBLXML, file of 2026-09-29 | ||
| HyunHo Jung | Hwaseong-si, KR | PTBLXML, file of 2026-09-29 | ||
| JongWon Nam | Pyeongtaek-si, KR | PTBLXML, file of 2026-09-29 | ||
| Shane Nunes | Cedar Park, TX | PTBLXML, file of 2026-09-29 | ||
| Pei Zhao | Leander, TX | 14 | PTBLXML, file of 2026-09-29 | |
| Anthony D. Ozzello | Round Rock, TX | PTBLXML, file of 2026-09-29 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| C01B | Non-metallic elements; compounds thereof; ; metalloids or compounds thereof not covered by subclass c01c | C01B33/10778 | PTBLXML, file of 2026-09-29 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.