Patents
US 12742097 B2: Compositions for polishing hardmasks and related systems and methods
- Granted
- 2026-09-22
- Filed
- 2024-01-12 application 18411986
- Type
- Utility · 3 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A system for polishing a hardmask comprises a composition comprising a permanganate ion of a permanganate oxidizer; a substrate comprising a hardmask that comprises at least one of a non-carbon boron component, a boron-carbon component, a non-carbon silicon component, a non-carbon chromium component, a non-carbon zirconium component, or any combination thereof; and a chemical mechanical planarization (CMP) apparatus configured to bring the composition and the substrate into contact so as to remove at least a portion of the hardmask of the substrate.
Source: PTBLXML, file of 2026-09-22 (ipgb20260922.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Entegris, Inc. 666 patents | US company or organization | Billerica, MA | ENTEGRIS, INC. Federal lobbying client EXACT high confidence: identical full name and state ENTEGRIS INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PTBLXML, file of 2026-09-22 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Rajiv K. Singh | Newberry, FL | PTBLXML, file of 2026-09-22 | ||
| Aditya Dilip Verma | Gainesville, FL | PTBLXML, file of 2026-09-22 | ||
| Sunny De | Oviedo, FL | 3 | PTBLXML, file of 2026-09-22 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| C09G | Polishing compositions ; ski waxes | C09G1/02 | PTBLXML, file of 2026-09-22 |
| B24B | Machines, devices, or processes for grinding or polishing ; dressing or conditioning of abrading surfaces; feeding of grinding, polishing, or lapping agents | B24B1/00 | PTBLXML, file of 2026-09-22 |
| C09K | Materials for miscellaneous applications, not provided for elsewhere | C09K3/1454 | PTBLXML, file of 2026-09-22 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P52/402 | PTBLXML, file of 2026-09-22 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.