Patents
US 12721097 B2: Method and device to regulate purge into a container
- Granted
- 2026-08-25
- Filed
- 2022-10-24 application 17972093
- Type
- Utility · 18 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
Substrate containers include purge flow distribution systems. The purge flow distribution systems can divide one or more input flows of purge gas to a plurality of gas distribution surfaces of a network of gas distribution devices. Methods of controlling purge can include configuring the substrate containers to provide determined purge gas flow rates at each of the gas distribution surfaces. The configuration can be performed using flow controls of the purge flow distribution systems. The purge gas flow rates can be determined based on purge performance parameters. A controller can direct the operation of the purge flow distribution systems. The controller and the substrate container can be combined in a substrate container purging system.
Source: PTBLXML, file of 2026-08-25 (ipgb20260825.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| ENTEGRIS, INC. 666 patents | US company or organization | Billerica, MA | ENTEGRIS, INC. Federal lobbying client EXACT high confidence: identical full name and state ENTEGRIS INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PTBLXML, file of 2026-08-25 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Matthew A. Fuller | Colorado Springs, CO | 38 | PTBLXML, file of 2026-08-25 | |
| Mark V. Smith | Colorado Springs, CO | 22 | PTBLXML, file of 2026-08-25 | |
| Shawn D. Eggum | Lonsdale, MN | 10 | PTBLXML, file of 2026-08-25 | |
| Thomas H. Wilkie | Colorado Springs, CO | PTBLXML, file of 2026-08-25 | ||
| Colton J. Harr | Monument, CO | 12 | PTBLXML, file of 2026-08-25 | |
| Michael C. Zabka | New Prague, MN | 8 | PTBLXML, file of 2026-08-25 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/3218 | PTBLXML, file of 2026-08-25 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.