Patents
US 12707928 B2: Substrate container with mechanically actuated exhaust valve
- Granted
- 2026-08-11
- Filed
- 2023-02-02 application 18105119
- Type
- Utility · 19 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A system is provided. The system includes a substrate container having at least two purge modules. Each purge module of the at least two purge modules includes a flow control device. The flow control device of each purge module is configured to be actuated for egress of a purge fluid. A method of actuating flow control devices of purge modules of a substrate container is provided. The method includes starting a purge process of the substrate container; streaming a purge fluid into an interior of the substrate container, the substrate container having at least two purge modules, each purge module of the at least two purge modules including a flow control device, the flow control device of each purge module being configured to be actuated for egress of the purge fluid; and actuating the flow control device for egress of the purge fluid.
Source: PTBLXML, file of 2026-08-11 (ipgb20260811.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| ENTEGRIS, INC. 666 patents | US company or organization | Billerica, MA | ENTEGRIS, INC. Federal lobbying client EXACT high confidence: identical full name and state ENTEGRIS INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PTBLXML, file of 2026-08-11 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Matthew A. Fuller | Colorado Springs, CO | 38 | PTBLXML, file of 2026-08-11 | |
| Mark V. Smith | Colorado Springs, CO | 22 | PTBLXML, file of 2026-08-11 | |
| Colton J. Harr | Monument, CO | 12 | PTBLXML, file of 2026-08-11 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H01L | Semiconductor devices not covered by class h10 | H01L21/67389 | PTBLXML, file of 2026-08-11 |
| G05D | Systems for controlling or regulating non-electric variables | G05D7/0635 | PTBLXML, file of 2026-08-11 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2023-02-02 | Assignment Assignment of assignor's interest | FULLER, MATTHEW A. signed 2022-12-05 SMITH, MARK V. signed 2022-12-05 HARR, COLTON J. signed 2022-12-05 | ENTEGRIS, INC. BILLERICA, MA | 62576/764 | PASDL, file of 2026-08-13 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.