Patents
US 12704373 B2: Drive and sense stress relief apparatus
- Granted
- 2026-08-11
- Filed
- 2023-05-19 application 18320793
- Type
- Utility · 20 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A MEMS device is provided comprising a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis; a drive structure coupled to the mass and configured to cause the mass to move along the first axis; a sense structure coupled to the mass and configured to detect motion of the mass along the second axis; a stress relief structure coupled to one of the drive structure or the sense structure; and at least one anchor coupled to an underlying substrate of the MEMS device, wherein the stress relief structure is coupled to the at least one anchor and the at least one anchor is disposed outside of the stress relief structure.
Source: PTBLXML, file of 2026-08-11 (ipgb20260811.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Analog Devices, Inc. 2,069 patents | US company or organization | Wilmington, MA | ANALOG DEVICES INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PTBLXML, file of 2026-08-11 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Gaurav Vohra | Sudbury, MA | 14 | PTBLXML, file of 2026-08-11 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01C | Measuring distances, levels or bearings; surveying; navigation; gyroscopic instruments; photogrammetry or videogrammetry | G01C19/5712 | PTBLXML, file of 2026-08-11 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.