Patents
US 12701958 B2: Reticle pod having coated sensor zones
- Granted
- 2026-08-04
- Filed
- 2021-04-16 application 17232581
- Type
- Utility · 10 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
Sensor zones are created on an inner pod of a reticle container using a dry coating method. The sensor zones are discrete zones having a specific spectral reflectivity. The sensor zones are positioned such that they can be read by a tool to determine distance of portions of the pod. The use of discrete zones and a dry coating method for applying those discrete zones overcomes issues with inconsistency and difficulty in cleaning or maintaining reflectance of an inner pod of the reticle container in comparison with inner pods plated entirely with material or other wet coating applied materials.
Source: PTBLXML, file of 2026-08-04 (ipgb20260804.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| ENTEGRIS, INC. 666 patents | US company or organization | Billerica, MA | ENTEGRIS, INC. Federal lobbying client EXACT high confidence: identical full name and state ENTEGRIS INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PTBLXML, file of 2026-08-04 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Russ V. Raschke | Chanhassen, MN | 28 | PTBLXML, file of 2026-08-04 | |
| Huaping Wang | Eden Prairie, MN | 8 | PTBLXML, file of 2026-08-04 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/1906 | PTBLXML, file of 2026-08-04 |
| C23C | Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general | C23C14/22 | PTBLXML, file of 2026-08-04 |
| G03F | Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; materials therefor; originals therefor; apparatus specially adapted therefor; | G03F1/66 | PTBLXML, file of 2026-08-04 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2022-07-08 | Security interest Security interest Security interest | ENTEGRIS, INC. signed 2022-07-06 ENTEGRIS GP, INC. signed 2022-07-06 POCO GRAPHITE, INC. signed 2022-07-06 | MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT BALTIMORE, MD | 60614/980 | PASDL, file of 2026-10-15 |
| 2022-07-08 | Security interest Security interest Security interest | ENTEGRIS, INC. signed 2022-07-06 ENTEGRIS GP, INC. signed 2022-07-06 POCO GRAPHITE, INC. signed 2022-07-06 CMC MATERIALS, INC. signed 2022-07-06 INTERNATIONAL TEST SOLUTIONS, LLC signed 2022-07-06 QED TECHNOLOGIES INTERNATIONAL, INC. signed 2022-07-06 | TRUIST BANK, AS NOTES COLLATERAL AGENT WILSON, NC | 60613/72 | PASDL, file of 2026-10-15 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.