Patents
US 12699325 B2: Systems and methods for combinatorial arrays using dynamic interference lithography
- Granted
- 2026-08-04
- Filed
- 2022-03-03 application 17653357
- Type
- Utility · 9 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A dynamic interference lithography (DIL) device is provided. The device includes a laser source configured for providing a laser beam, a substrate stage configured for mounting a substrate, an at least partially convex curved mirror, and a spatial filter configured to divide the laser beam into a first beam portion directed towards the at least partially convex curved mirror and a second beam portion directed towards the substrate. The first beam portion is reflected by the at least partially convex curved mirror towards the substrate to form an interference pattern on the substrate.
Source: PTBLXML, file of 2026-08-04 (ipgb20260804.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| RUTGERS, THE STATE UNIVERSITY OF NEW JERSEY 917 patents | US company or organization | New Brunswick, NJ | RUTGERS - THE STATE UNIVERSITY OF NEW JERSEY Federal lobbying client EXACT high confidence: identical full name and state | PTBLXML, file of 2026-08-04 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Ki-Bum Lee | Monmouth Junction, NJ | 16 | PTBLXML, file of 2026-08-04 | |
| Letao Yang | Piscataway, NJ | 3 | PTBLXML, file of 2026-08-04 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G03F | Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; materials therefor; originals therefor; apparatus specially adapted therefor; | G03F7/70408 | PTBLXML, file of 2026-08-04 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.