Patents

US 12617670 B2: MEMS bump stopper surface features

Granted
2026-05-05
Filed
2022-12-22 application 18087602
Type
Utility · 9 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

A microelectromechanical system (MEMS) sensor assembly comprises a substrate, a bump stopper extending from the substrate, and a sensor suspended relative to the substrate. The sensor is configured to move relative to the substrate, wherein the bump stopper is configured to restrain the sensor travel distance and prevent contact between the sensor and the substrate. The bump stopper has a surface facing the sensor, wherein an area of contact between the sensor and the surface is less than the total area of the surface.

Source: PTBLXML, file of 2026-05-05 (ipgb20260505.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
Knowles Electronics, LLC 414 patentsUS company or organizationItasca, ILPTBLXML, file of 2026-05-05

Inventors

InventorPlacePatentsPerson pageSource
Ken DengSchaumburg, IL10PTBLXML, file of 2026-05-05
Bing YuElk Grove Village, IL37PTBLXML, file of 2026-05-05
Michael PedersenLong Grove, ILPTBLXML, file of 2026-05-05
Nicholas PalcheckRoselle, ILPTBLXML, file of 2026-05-05
Jeremy JohnsonGlen Ellyn, IL22PTBLXML, file of 2026-05-05
Richard Li-Chen ChenZhubei, TWPTBLXML, file of 2026-05-05

CPC categories

SubclassCategoryFirst groupSource
B81BMicrostructural devices or systems, e.g. micromechanical devicesB81B3/0013PTBLXML, file of 2026-05-05
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systemsB81C1/00111PTBLXML, file of 2026-05-05

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

RecordedWhatFromToReel/frameSource
2022-12-23Assignment
Assignment of assignor's interest
DENG, KEN signed 2022-12-16
YU, BING signed 2022-12-21
PEDERSEN, MICHAEL signed 2022-12-16
PALCHECK, NICHOLAS signed 2022-12-16
JOHNSON, JEREMY signed 2022-12-21
CHEN, RICHARD LI-CHEN signed 2022-12-20
KNOWLES ELECTRONICS, LLC ITASCA, IL62193/486PASDL, file of 2026-10-15

Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.

USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.