Patents
US 12598935 B2: Composition and method for conducting a material removing operation
- Granted
- 2026-04-07
- Filed
- 2023-07-27 application 18360042
- Type
- Utility · 19 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
In one embodiment, a polishing composition can comprise abrasive particles including zirconia, an oxidizing agent including hydroxylamine and water. The polishing composition can have a high copper removal rate of at least 3500 Å/min, and a polishing selectivity of copper to silicon dioxide(Cu:SiO2) can be at least 2.5:1. In another embodiment, a combination product can comprise a first polishing composition and a second polishing composition, wherein each of the first polishing composition and the second polishing composition can comprise abrasive particles including zirconia and an oxidizing agent including hydroxylamine, wherein a hydroxylamine weight % ratio of the first polishing composition to the second polishing composition may be at least 5:1.
Source: PTBLXML, file of 2026-04-07 (ipgb20260407.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| SAINT-GOBAIN CERAMICS & PLASTICS, INC. 397 patents | US company or organization | Worcester, MA | PTBLXML, file of 2026-04-07 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Renjie Zhou | Alhambra, CA | PTBLXML, file of 2026-04-07 | ||
| Lin Fu | Rancho Palos Verdes, CA | 73 | PTBLXML, file of 2026-04-07 | |
| Chun-Lung Kuan | Anaheim, CA | 2 | PTBLXML, file of 2026-04-07 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P52/403 | PTBLXML, file of 2026-04-07 |
| C09G | Polishing compositions ; ski waxes | C09G1/02 | PTBLXML, file of 2026-04-07 |
| C09K | Materials for miscellaneous applications, not provided for elsewhere | C09K3/1409 | PTBLXML, file of 2026-04-07 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.