Patents

US 12589987 B2: Microelectromechanical systems sensor with frequency dependent input attenuator

Granted
2026-03-31
Filed
2022-12-29 application 18090987
Type
Utility · 16 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

A microelectromechanical systems (MEMS) sensor, a capacitive MEMS motor sensing circuit and a method are provided. The present application provides a microelectromechanical systems (MEMS) sensor. The MEMS sensor includes a housing having electrical contacts disposed on an exterior of the housing. The MEMS sensor further includes a capacitive MEMS motor disposed in the housing, and an electrical circuit disposed in the housing and being electrically coupled to the electrical contacts. The electrical circuit includes a bias voltage source having an output coupled to an input of the MEMS motor. The electrical circuit further includes a buffer circuit including an amplifier input stage having an input coupled to an output of the MEMS motor. The electrical circuit still further includes a frequency dependent input attenuator including a feedback capacitor and an input attenuator low pass filter, the input attenuator low pass filter having an input coupled to the output of the amplifier input stage and an output coupled to a first terminal of the feedback capacitor, where a second terminal of the feedback capacitor is coupled to the input of the amplifier input stage.

Source: PTBLXML, file of 2026-03-31 (ipgb20260331.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
Knowles Electronics, LLC 414 patentsUS company or organizationItasca, ILPTBLXML, file of 2026-03-31

Inventors

InventorPlacePatentsPerson pageSource
Michael JenningsMcKinney, TXPTBLXML, file of 2026-03-31
Steven BoorPlano, TX24PTBLXML, file of 2026-03-31
Divya KesharwaniRolling Meadows, ILPTBLXML, file of 2026-03-31

CPC categories

SubclassCategoryFirst groupSource
B81BMicrostructural devices or systems, e.g. micromechanical devicesB81B7/008PTBLXML, file of 2026-03-31
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systemsB81C1/0023PTBLXML, file of 2026-03-31
H04RLoudspeakers, microphones, gramophone pick-ups or like acoustic electromechanical transducers; electric hearing aids; public address systemsH04R2201/003PTBLXML, file of 2026-03-31

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

No recorded assignments or security interests on file for this patent.

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