Patents
US 12541214 B2: Pressure sensing and regulating system
- Granted
- 2026-02-03
- Filed
- 2023-04-10 application 18132763
- Type
- Utility · 15 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A high pressure fluid storage device with a pressure sensing and regulating system configured for delivery of vaporized solid and liquid precursor materials at a regulated pressure range. At least some components of the pressure regulating system is contained internally within the storage device.
Source: PTBLXML, file of 2026-02-03 (ipgb20260203.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| ENTEGRIS, INC. 666 patents | US company or organization | Billerica, MA | ENTEGRIS, INC. Federal lobbying client EXACT high confidence: identical full name and state ENTEGRIS INC SEC filer EXACT medium confidence: identical full name, one of each nationally | PTBLXML, file of 2026-02-03 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Thines Kumar Perumal | Singapore, SG | 10 | PTBLXML, file of 2026-02-03 | |
| Aravind Vasanthakumar | Singapore, SG | 7 | PTBLXML, file of 2026-02-03 | |
| Subhash Guddati | Singapore, SG | 11 | PTBLXML, file of 2026-02-03 | |
| Montray Leavy | Singapore, SG | 16 | PTBLXML, file of 2026-02-03 | |
| Sanado Barolli | Bethlehem, CT | 2 | PTBLXML, file of 2026-02-03 | |
| Edward E. Jones | Woodbury, CT | 20 | PTBLXML, file of 2026-02-03 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G05D | Systems for controlling or regulating non-electric variables | G05D16/163 | PTBLXML, file of 2026-02-03 |
| F17C | Vessels for containing or storing compressed, liquefied or solidified gases; fixed-capacity gas-holders; filling vessels with, or discharging from vessels, compressed, liquefied, or solidified gases | F17C2205/0338 | PTBLXML, file of 2026-02-03 |
| Y10T | Technical subjects covered by former us classification | Y10T137/7761 | PTBLXML, file of 2026-02-03 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.