Patents
US 12516438 B2: Methods of fabricating porous silicon structures
- Granted
- 2026-01-06
- Filed
- 2025-01-06 application 19011225
- Type
- Utility · 18 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
The present disclosure provides methods of manufacturing porous silicon structures having controlled sizes, shapes, and porosity by using a series of protective layers and selective etching steps. A benefit of the methods disclosed herein can be providing microfabrication and nanofabrication methods that are capable of provide porous silicon structures having sizes, shapes, and porosity that are more tightly controlled by avoiding inadvertently etching parts of the silicon structures during the fabrication process.
Source: PTBLXML, file of 2026-02-13 (ipgb20260106.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| The Methodist Hospital 51 patents | US company or organization | Houston, TX | THE METHODIST HOSPITAL State business registration EXACT high confidence: identical full name and state THE METHODIST HOSPITAL Nonprofit EXACT high confidence: identical full name and state | PTBLXML, file of 2026-02-13 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Xuewu Liu | Sugar Land, TX | 14 | PTBLXML, file of 2026-02-13 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| C25F | Processes for the electrolytic removal of materials from objects; apparatus therefor | C25F3/12 | PTBLXML, file of 2026-02-13 |
| B81C | Processes or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems | B81C1/00119 | PTBLXML, file of 2026-02-13 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.