Patents

US 12456635 B2: Rotatable electrochemical etching cell

Granted
2025-10-28
Filed
2024-12-13 application 18980720
Type
Utility · 16 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

The present disclosure provides a reaction chamber, and methods of using the same, wherein the reaction chamber includes a mesh cathode, a first anode, a second anode, and a reaction chamber body, wherein the reaction chamber body is hollow and has a first opening and a second opening, where semiconductor wafers to be electrochemically etched can be sealed. One benefit of the reaction chamber and methods disclosed herein can be allowing for numerous etching operations to be performed with minimal or no contact of the operator with the etching solution, such as hydrofluoric acid.

Source: PVGPATDIS, file of 2026-04-10 (ipg251028.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
The Methodist Hospital 51 patentsUS company or organizationHouston, TXTHE METHODIST HOSPITAL State business registration EXACT high confidence: identical full name and state
THE METHODIST HOSPITAL Nonprofit EXACT high confidence: identical full name and state
PVGPATDIS, file of 2026-04-10

Inventors

InventorPlacePatentsPerson pageSource
Xuewu LiuSugar Land, TX14PVGPATDIS, file of 2026-04-10
Gauri BhaveRichmond, TX1PVGPATDIS, file of 2026-04-10

CPC categories

SubclassCategoryFirst groupSource
C25BElectrolytic or electrophoretic processes for the production of compounds or non-metals; apparatus thereforC25B9/19PVGPATDIS, file of 2026-04-10
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h10H10P72/0426PVGPATDIS, file of 2026-04-10

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

RecordedWhatFromToReel/frameSource
2025-09-09Government interest
Confirmatory license
METHODIST HOSPITAL RESEARCH INSTITUTE signed 2025-05-20UNITED STATES GOVERNMENT FORT DETRICK, MD72195/839ECORSEXC, file of 2026-09-25
2025-01-09Assignment
Assignment of assignor's interest
BHAVE, GAURI signed 2022-10-05
LIU, XUEWU signed 2022-10-05
THE METHODIST HOSPITAL HOUSTON, TX69804/368ECORSEXC, file of 2026-09-25

Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.

USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.