Patents
US 12191187 B2: Dual arm with opposed dual end effectors and no vertical wafer overlap
- Granted
- 2025-01-07
- Filed
- 2020-10-15 application 17071486
- Type
- Utility · 20 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
An apparatus including a drive; and a movable arm assembly connected to the drive. The movable arm assembly includes a first arm and a second arm, where the first arm includes a first upper arm, a first forearm and a first end effector, and where the second arm includes a second upper arm, a second forearm and a second end effector. The first end effector includes at least two first substrate holding areas. The second end effector includes at least two second substrate holding areas. The drive and the movable arm assembly are configured to prevent the movable arm assembly from passing over top sides of substrates located on the first and second substrate holding areas.
Source: PVGPATDIS, file of 2026-04-10 (ipg250107.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Persimmon Technologies Corporation 119 patents | US company or organization | Wakefield, MA | PERSIMMON TECHNOLOGIES CORPORATION State business registration EXACT high confidence: identical full name and state Persimmon Technologies Corp Form D issuer FUZZY medium confidence: same name (legal endings aside) and state | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Scott Wilkas | Lexington, MA | 17 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/7602 | PVGPATDIS, file of 2026-04-10 |
| B25J | Manipulators; chambers provided with manipulation devices | B25J9/043 | PVGPATDIS, file of 2026-04-10 |
| H01L | Semiconductor devices not covered by class h10 | H01L21/67155 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2023-06-16 | Assignment Assignment of assignor's interest | WILKAS, SCOTT signed 2023-06-06 | PERSIMMON TECHNOLOGIES CORPORATION WAKEFIELD, MA | 63970/380 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.