Patents

US 12103176 B2: Linear robot with two-link arm

Granted
2024-10-01
Filed
2020-02-12 application 16788941
Type
Utility · 17 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

An apparatus including a linear transport configured to move in a transport chamber along a straight path; a robot connected to the linear transport, where the robot includes a robot drive and a robot arm connected to the robot drive, where the robot arm is a dual-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; a controller connected to the linear transport and to the robot drive, where the controller is configured to provide movement of the linear transport along the straight path at a same time as extension and retraction of the dual-link arm to thereby move the end effector into or out of a substrate process chamber or a substrate holding area while both the linear transport and the dual-link arm are moving.

Source: PVGPATDIS, file of 2026-04-10 (ipg241001.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
Persimmon Technologies Corporation 119 patentsUS company or organizationWakefield Junction, MAPERSIMMON TECHNOLOGIES CORPORATION State business registration EXACT high confidence: identical full name and state
Persimmon Technologies Corp Form D issuer FUZZY medium confidence: same name (legal endings aside) and state
PVGPATDIS, file of 2026-04-10

Inventors

InventorPlacePatentsPerson pageSource
Scott WilkasLexington, MA17PVGPATDIS, file of 2026-04-10

CPC categories

SubclassCategoryFirst groupSource
B25JManipulators; chambers provided with manipulation devicesB25J9/123PVGPATDIS, file of 2026-04-10
H01LSemiconductor devices not covered by class h10H01L21/67742PVGPATDIS, file of 2026-04-10
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyorsB65G47/905PVGPATDIS, file of 2026-04-10

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

RecordedWhatFromToReel/frameSource
2023-06-19Assignment
Assignment of assignor's interest
WILKAS, SCOTT signed 2023-06-06PERSIMMON TECHNOLOGIES CORPORATION WAKEFIELD, MA63983/757ECORSEXC, file of 2026-09-25

Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.

USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.