Patents
US 12011829 B2: Substrate transport with unequal number of drive shafts and arm links
- Granted
- 2024-06-18
- Filed
- 2022-10-14 application 17965907
- Type
- Utility · 21 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A substrate transport arm including a first link, a second link, a third link, and a mechanical transmission including a pulley. The third link includes an end effector configured to support a substrate thereon. The mechanical transmission is configured to control rotation of the third link on the second link as a function of an angle between the first and second links such that, as the first and second links are rotated relative to each other, the wrist joint follows a wrist path which includes a curved portion. Rotation of the third link relative to the second link is completely mechanically dependent upon rotational location of the second link on the first link. The rotation of the third link about the second link is mechanically constrained and limited by mechanical dependence based upon the function of the angle between the first and second links.
Source: PVGPATDIS, file of 2026-04-10 (ipg240618.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Persimmon Technologies Corporation 119 patents | US company or organization | Wakefield, MA | PERSIMMON TECHNOLOGIES CORPORATION State business registration EXACT high confidence: identical full name and state Persimmon Technologies Corp Form D issuer FUZZY medium confidence: same name (legal endings aside) and state | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Scott Wilkas | Lexington, MA | 17 | PVGPATDIS, file of 2026-04-10 | |
| Martin Hosek | Lowell, MA | 146 | PVGPATDIS, file of 2026-04-10 | |
| Jacob Lipcon | Arlington, MA | 8 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| B25J | Manipulators; chambers provided with manipulation devices | B25J9/042 | PVGPATDIS, file of 2026-04-10 |
| H01L | Semiconductor devices not covered by class h10 | H01L21/67742 | PVGPATDIS, file of 2026-04-10 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/3302 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
No recorded assignments or security interests on file for this patent.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.