Patents
US 11675208 B1: Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system
- Granted
- 2023-06-13
- Filed
- 2021-03-05 application 17300091
- Type
- Utility · 42 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.
Source: PVGPATDIS, file of 2026-04-10 (ipg230613.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| J.A. WOOLLAM CO., INC. 108 patents | US company or organization | Lincoln, NE | J.A. WOOLLAM CO., INC. State business registration EXACT high confidence: identical full name and state | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Stefan Schoeche | Lincoln, NE | 9 | PVGPATDIS, file of 2026-04-10 | |
| Martin M. Liphardt | Lincoln, NE | 78 | PVGPATDIS, file of 2026-04-10 | |
| Ping He | Lincoln, NE | 84 | PVGPATDIS, file of 2026-04-10 | |
| Jeremy A. Van Derslice | Dwight, NE | 9 | PVGPATDIS, file of 2026-04-10 | |
| Craig M. Herzinger | Lincoln, NE | 36 | PVGPATDIS, file of 2026-04-10 | |
| Jeffrey S. Hale | Lincoln, NE | 17 | PVGPATDIS, file of 2026-04-10 | |
| Brian D. Guenther | Lincoln, NE | 3 | PVGPATDIS, file of 2026-04-10 | |
| Duane E. Meyer | Lincoln, NE | 7 | PVGPATDIS, file of 2026-04-10 | |
| John A. Woollam | Lincoln, NE | 19 | PVGPATDIS, file of 2026-04-10 | |
| James D. Welch | Omaha, NE | 52 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01J | Measurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light; colorimetry; radiation pyrometry | G01J3/0205 | PVGPATDIS, file of 2026-04-10 |
| G02B | Optical elements, systems or apparatus | G02B27/48 | PVGPATDIS, file of 2026-04-10 |
| G01B | Measuring length, thickness or similar linear dimensions; measuring angles; measuring areas; measuring irregularities of surfaces or contours | G01B9/02084 | PVGPATDIS, file of 2026-04-10 |
| G01N | Investigating or analysing materials by determining their chemical or physical properties | G01N21/211 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2021-04-02 | Assignment Assignment of assignor's interest | HERZINGER, CRAIG M. signed 2021-02-18 LIPHARDT, MARTIN M. signed 2021-02-18 MEYER, DUANE E. signed 2021-02-18 SCHOECHE, STEFAN signed 2021-02-18 GUENTHER, BRIAN D. signed 2021-02-19 HE, PING signed 2021-02-19 HALE, JEFFREY S. signed 2021-02-22 VAN DERSLICE, JEREMY A. signed 2021-03-02 WOOLLAM, JOHN A. signed 2021-03-02 WELCH, JAMES D. signed 2021-03-26 | J. A. WOOLLAM CO., INC. LINCOLN, NE | 55825/834 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.