Patents
US 11674221 B2: Erosion / corrosion resistant barrier coating
- Granted
- 2023-06-13
- Filed
- 2017-12-22 application 15852399
- Type
- Utility · 27 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
Disclosed are barrier coatings for fused silica components used in semiconductor processing. In particular, the present disclosure concerns protective substrate-barrier coatings composed of corrosion-resilient metal compounds which provide superior resistance to erosion/corrosion when a coated substrate is subjected to the acidic environments at elevated temperatures typical for semiconductor processing.
Source: PVGPATDIS, file of 2026-04-10 (ipg230613.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| CONAX TECHNOLOGIES 2 patents | US company or organization | Buffalo, NY | CONAX TECHNOLOGIES LLC State business registration FUZZY medium confidence: same name (legal endings aside) and state | PVGPATDIS, file of 2026-04-10 |
| Alfred University 3 patents | US company or organization | Alfred, NY | Alfred University College or university EXACT high confidence: identical full name and state ALFRED UNIVERSITY Federal lobbying client EXACT high confidence: identical full name and state ALFRED UNIVERSITY Nonprofit EXACT high confidence: identical full name and state | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Matthew M. Hall | Mendon, NY | 1 | PVGPATDIS, file of 2026-04-10 | |
| Timothy J. Keenan | Wellsville, NY | 5 | PVGPATDIS, file of 2026-04-10 | |
| Lana Margaret Placek | Niagara Falls, NY | 1 | PVGPATDIS, file of 2026-04-10 | |
| Scott Michael Kroon | Orchard Park, NY | 1 | PVGPATDIS, file of 2026-04-10 | |
| William Sean Halligan | Boston, NY | 1 | PVGPATDIS, file of 2026-04-10 | |
| Michael Edward Ferraro | Lockport, NY | 1 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| C23C | Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general | C23C16/4404 | PVGPATDIS, file of 2026-04-10 |
| C03C | Chemical composition of glasses, glazes or vitreous enamels; surface treatment of glass; surface treatment of fibres or filaments made from glass, minerals or slags; joining glass to glass or other materials | C03C17/22 | PVGPATDIS, file of 2026-04-10 |
| C23D | Enamelling of, or applying a vitreous layer to, metals | C23D5/02 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2018-02-12 | Assignment Assignment of assignor's interest | HALL, MATTHEW M. signed 2018-01-10 KEENAN, TIMOTHY signed 2018-01-16 | ALFRED UNIVERSITY ALFRED, NY | 44899/29 | ECORSEXC, file of 2026-09-25 |
| 2018-02-12 | Assignment Assignment of assignor's interest | FERRARO, MICHAEL EDWARD signed 2018-01-02 HALLIGAN, WILLIAM SEAN signed 2018-01-02 KROON, SCOTT MICHAEL signed 2018-01-02 PLACEK, LANA MARGARET signed 2018-01-02 | CONAX TECHNOLOGIES BUFFALO, NY | 44898/888 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.