Patents
US 11549895 B2: System and method using x-rays for depth-resolving metrology and analysis
- Granted
- 2023-01-10
- Filed
- 2021-09-15 application 17476355
- Type
- Utility · 23 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A system and method for analyzing a three-dimensional structure of a sample includes generating a first x-ray beam having a first energy bandwidth less than 20 eV at full-width-at-half maximum and a first mean x-ray energy that is in a range of 1 eV to 1 keV higher than an absorption edge energy of a first atomic element of interest, and that is collimated to have a collimation angular range less than 7 mrad in at least one direction perpendicular to a propagation direction of the first x-ray beam; irradiating the sample with the first x-ray beam at a plurality of incidence angles relative to a substantially flat surface of the sample, the incidence angles of the plurality of incidence angles in a range of 3 mrad to 400 mrad; and simultaneously detecting a reflected portion of the first x-ray beam from the sample and detecting x-ray fluorescence x-rays and/or photoelectrons from the sample.
Source: PVGPATDIS, file of 2026-04-10 (ipg230110.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Sigray, Inc. 52 patents | US company or organization | Concord, CA | SIGRAY, INC. State business registration EXACT high confidence: identical full name and state | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Wenbing Yun | Walnut Creek, CA | 71 | PVGPATDIS, file of 2026-04-10 | |
| Benjamin Donald Stripe | Walnut Creek, CA | 11 | PVGPATDIS, file of 2026-04-10 | |
| Janos Kirz | Berkeley, CA | 51 | PVGPATDIS, file of 2026-04-10 | |
| Sylvia Jia Yun Lewis | San Francisco, CA | 44 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01N | Investigating or analysing materials by determining their chemical or physical properties | G01N23/20 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2022-02-23 | Assignment Assignment of assignor's interest | KIRZ, JANOS signed 2022-01-27 LEWIS, SYLVIA JIA YUN signed 2022-01-28 STRIPE, BENJAMIN DONALD signed 2022-01-28 YUN, WENBING signed 2022-01-28 | SIGRAY, INC. CONCORD, CA | 59080/115 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.