Patents
US 11535935 B2: Deposition system with vacuum pre-loaded deposition head
- Granted
- 2022-12-27
- Filed
- 2020-06-17 application 16903505
- Type
- Utility · 12 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A thin film deposition system includes a vacuum-preloaded gas bearing deposition head positioned in an external environment having an ambient pressure, the deposition head having an output face including a plurality of source openings through which gaseous materials are supplied and one or more exhaust openings. An exhaust pressure at the exhaust openings is less than ambient pressure, and a source pressure at the source openings is greater than that at the exhaust openings, with the pressure at the outermost source openings being greater than ambient pressure. A motion control system moves a substrate unit over the output face in the in-track direction without constraining its motion in a direction normal to the output face to a point where a center of gravity of the substrate unit is beyond the first edge of the output face.
Source: PVGPATDIS, file of 2026-04-10 (ipg221227.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| EASTMAN KODAK COMPANY 2,417 patents | US company or organization | Rochester, NY | EASTMAN KODAK COMPANY Federal lobbying client EXACT high confidence: identical full name and state EASTMAN KODAK CO SEC filer FUZZY low confidence: same name (legal endings aside), one of each nationally | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Todd Mathew Spath | Hilton, NY | 25 | PVGPATDIS, file of 2026-04-10 | |
| Carolyn Rae Ellinger | Rochester, NY | 74 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| C23C | Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general | C23C16/45544 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2021-03-04 | Security interest Security interest Notice of security interests | EASTMAN KODAK COMPANY signed 2021-02-26 | BANK OF AMERICA, N.A., AS AGENT BOSTON, MA | 56984/1 | PASDL, file of 2026-10-15 |
| 2021-03-04 | Security interest Security interest Intellectual property security agreement | EASTMAN KODAK COMPANY signed 2021-02-26 | ALTER DOMUS (US) LLC CHICAGO, IL | 56734/233 | PASDL, file of 2026-10-15 |
| 2021-03-04 | Security interest Security interest Intellectual property security agreement | EASTMAN KODAK COMPANY signed 2021-02-26 | ALTER DOMUS (US) LLC CHICAGO, IL | 56734/1 | PASDL, file of 2026-10-15 |
| 2021-03-04 | Security interest Security interest Intellectual property security agreement | EASTMAN KODAK COMPANY signed 2021-02-26 | ALTER DOMUS (US) LLC CHICAGO, IL | 56733/681 | PASDL, file of 2026-10-15 |
| 2020-09-08 | Assignment Assignment of assignor's interest | SPATH, TODD MATHEW signed 2020-08-12 ELLINGER, CAROLYN RAE signed 2020-09-01 | EASTMAN KODAK COMPANY ROCHESTER, NY | 53705/938 | ECORSEXC, file of 2026-09-25 |
| 2020-08-25 | Security interest Security interest Security interest | EASTMAN KODAK COMPANY signed 2020-08-11 FAR EAST DEVELOPMENT LTD. signed 2020-08-11 FPC INC. signed 2020-08-11 KODAK (NEAR EAST) INC. signed 2020-08-11 KODAK AMERICAS LTD. signed 2020-08-11 LASER-PACIFIC MEDIA CORPORATION signed 2020-08-11 KODAK PHILIPPINES LTD. signed 2020-08-11 NPEC, INC. signed 2020-08-11 | BANK OF AMERICA, AS AGENT BOSTON, MA | 53596/518 | PASDL, file of 2026-10-15 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.