Patents

US 11391666 B1: Snapshot ellipsometer

Granted
2022-07-19
Filed
2020-04-06 application 16873386
Type
Utility · 25 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

A snapshot ellipsometer or polarimeter which does not require temporally modulated element(s) to measure a sample, but instead uses one or more spatially varying compensators, (eg. microretarder arrays and compound prisms), to vary the polarization state within a measurement beam of electromagnetic radiation. Analysis of an intensity profile of the beam after interaction with the spatially varying compensator(s) and the sample, and after having source beam wavelength content determined using a digital light processor, and/or being directed by a digital light processor elements toward elements in the detector, allows sample parameters to be characterized.

Source: PVGPATDIS, file of 2026-04-10 (ipg220719.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
J.A. WOOLLAM CO., INC. 108 patentsUS company or organizationLincoln, NEJ.A. WOOLLAM CO., INC. State business registration EXACT high confidence: identical full name and statePVGPATDIS, file of 2026-04-10

Inventors

InventorPlacePatentsPerson pageSource
Griffin A. P. HovorkaLincoln, NE4PVGPATDIS, file of 2026-04-10
Jeremy A. Van DersliceDwight, NE9PVGPATDIS, file of 2026-04-10
Martin M. LiphardtMorse Bluff, NE78PVGPATDIS, file of 2026-04-10

CPC categories

SubclassCategoryFirst groupSource
G01NInvestigating or analysing materials by determining their chemical or physical propertiesG01N21/211PVGPATDIS, file of 2026-04-10
G02BOptical elements, systems or apparatusG02B5/3083PVGPATDIS, file of 2026-04-10

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

RecordedWhatFromToReel/frameSource
2022-04-19Assignment
Assignment of assignor's interest
HOVORKA, GRIFFIN A. P. signed 2020-03-19
VAN DRSLICE, JERENY signed 2020-03-19
LIPHARDT, MARTIN M. signed 2020-03-27
J.A. WOOLLAM CO., INC. LINCOLN, NE60765/384ECORSEXC, file of 2026-09-25

Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.

USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.