Patents

US 11275031 B2: Porous waveguide sensors featuring high confinement factors and method for making the same

Granted
2022-03-15
Filed
2019-09-05 application 16561093
Type
Utility · 15 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

Devices and methods of providing a high-performance optical sensor disclose a sensor comprised of a porous material designed to have a multilayer rib-type or multilayer pillar-type waveguide geometry. The resulting porous nanomaterial multilayer-rib or multilayer-pillar waveguide design is optically capable of achieving ˜100% confinement factor while maintaining small mode area and single-mode character. Fabrication of the device is enabled by an inverse processing technique, wherein silicon wafers are first patterned and etched through well-established techniques, which allows porous nanomaterial synthesis (i.e., porous silicon anodization) either at the wafer-scale or at the chip-scale after wafer dicing. While ˜100% is an optimal target, typical devices per presently disclosed subject matter may operate with ˜98-99+%, while allowing for some design adjustments to be made if necessary, and still maintaining high sensitivity. i.e., >85-90% confinement suitable in some applications. In those instances, a primary benefit would still be use of the presently disclosed fabrication technology.

Source: PVGPATDIS, file of 2026-04-10 (ipg220315.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
Clemson University 122 patentsUS company or organizationClemson, SCClemson University State business registration EXACT high confidence: identical full name and state
Clemson University College or university EXACT high confidence: identical full name and state
PVGPATDIS, file of 2026-04-10

Inventors

InventorPlacePatentsPerson pageSource
Judson D. RyckmanClemson, SC12PVGPATDIS, file of 2026-04-10
Gabriel AllenClemson, SC1PVGPATDIS, file of 2026-04-10
William DelaneyClemson, SC1PVGPATDIS, file of 2026-04-10
Tahmid TalukdarClemson, SC1PVGPATDIS, file of 2026-04-10

CPC categories

SubclassCategoryFirst groupSource
G01NInvestigating or analysing materials by determining their chemical or physical propertiesG01N21/7703PVGPATDIS, file of 2026-04-10
G02BOptical elements, systems or apparatusG02B6/1225PVGPATDIS, file of 2026-04-10
B82YSpecific uses or applications of nanostructures; measurement or analysis of nanostructures; manufacture or treatment of nanostructuresB82Y20/00PVGPATDIS, file of 2026-04-10

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

RecordedWhatFromToReel/frameSource
2019-12-16Assignment
Assignment of assignor's interest
DELANEY, WILLIAM FREDERICK signed 2019-10-21
TALUKDAR, TAHMID signed 2019-11-08
RYCKMAN, JUDSON signed 2019-12-06
ALLEN, GABRIEL signed 2019-12-12
CLEMSON UNIVERSITY CLEMSON, SC51290/170ECORSEXC, file of 2026-09-25
2019-10-01Government interest
Confirmatory license
CLEMSON UNIVERSITY signed 2019-09-11NATIONAL SCIENCE FOUNDATION ALEXANDRIA, VA50592/731ECORSEXC, file of 2026-09-25

Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.

USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.