Patents
US 11175243 B1: X-ray dark-field in-line inspection for semiconductor samples
- Granted
- 2021-11-16
- Filed
- 2021-02-04 application 17167870
- Type
- Utility · 17 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
An x-ray imaging/inspection system includes an x-ray source having a plurality of sub-sources in thermal communication with a substrate. The system further includes a first grating positioned to receive at least some of the x-rays from the x-ray source, a stage configured to hold a sample positioned to receive at least some of the x-rays from the x-ray source, at least one x-ray detector, and a second grating having periodic structures. The x-ray source, the first grating, and the second grating are configured such that a ratio of a pitch p0 of the plurality of sub-sources to a pitch p2 of the periodic structures of the second grating is substantially equal to a ratio of a distance dS-G1 between the plurality of sub-sources and the first grating and a distance dG1-G2 between the first grating and the second grating: (p0/p2)=(dS-G1/dG1-G2).
Source: PVGPATDIS, file of 2026-04-10 (ipg211116.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Sigray, Inc. 52 patents | US company or organization | Concord, CA | SIGRAY, INC. State business registration EXACT high confidence: identical full name and state | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Wenbing Yun | Walnut Creek, CA | 71 | PVGPATDIS, file of 2026-04-10 | |
| Sylvia Jia Yun Lewis | San Francisco, CA | 44 | PVGPATDIS, file of 2026-04-10 | |
| Janos Kirz | Berkeley, CA | 51 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01N | Investigating or analysing materials by determining their chemical or physical properties | G01N23/041 | PVGPATDIS, file of 2026-04-10 |
| H01L | Semiconductor devices not covered by class h10 | H01L22/12 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2026-03-10 | Government interest Confirmatory license | SIGRAY, INC. signed 2025-11-20 | U.S. DEPARTMENT OF ENERGY WASHINGTON, DC | 75070/753 | PASDL, file of 2026-10-15 |
| 2021-03-29 | Assignment Assignment of assignor's interest | LEWIS, SYLVIA JIA YUN signed 2021-02-22 YUN, WENBING signed 2021-02-22 KIRZ, JANOS signed 2021-03-24 | SIGRAY, INC. CONCORD, CA | 55745/237 | ECORSEXC, file of 2026-09-25 |
| 2021-02-16 | Assignment Assignment of assignor's interest | LEWIS, SYLVIA JIA YUN signed 2021-02-08 YUN, WENBING signed 2021-02-08 KIRZ, JANOS signed 2021-02-11 | SIGRAY, INC. CONCORD, CA | 55272/354 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.