Patents

US 11035729 B1: Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system

Granted
2021-06-15
Filed
2019-08-05 application 16602088
Type
Utility · 22 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.

Source: PVGPATDIS, file of 2026-04-10 (ipg210615.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
J.A. WOOLLAM CO., INC. 108 patentsUS company or organizationLincoln, NEJ.A. WOOLLAM CO., INC. State business registration EXACT high confidence: identical full name and statePVGPATDIS, file of 2026-04-10

Inventors

InventorPlacePatentsPerson pageSource
Jeremy A. Van DersliceLincoln, NE9PVGPATDIS, file of 2026-04-10
Martin M. LiphardtLincoln, NE78PVGPATDIS, file of 2026-04-10

CPC categories

SubclassCategoryFirst groupSource
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light; colorimetry; radiation pyrometryG01J3/447PVGPATDIS, file of 2026-04-10
G01NInvestigating or analysing materials by determining their chemical or physical propertiesG01N21/55PVGPATDIS, file of 2026-04-10
G01BMeasuring length, thickness or similar linear dimensions; measuring angles; measuring areas; measuring irregularities of surfaces or contoursG01B9/02PVGPATDIS, file of 2026-04-10

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

RecordedWhatFromToReel/frameSource
2019-10-31Assignment
Assignment of assignor's interest
LIPHARDT, MARTIN M. signed 2019-07-22
VAN DERSLICE, JEREMY A. signed 2019-07-30
J. A. WOOLLAM CO., INC. LINCOLN, NE50944/721ECORSEXC, file of 2026-09-25

Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.

USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.