Patents
US 10968522 B2: Fabrication of metallic optical metasurfaces
- Granted
- 2021-04-06
- Filed
- 2018-04-02 application 15943350
- Type
- Utility · 23 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
The disclosure provides a method for fabricating a metallic optical metasurface having an array of hologram elements. The method includes forming a first copper layer protected with a conducting or dielectric barrier layer over a backplane structure by a damascene process. The first copper layer comprises a plurality of nano-gaps vertically extending from the backplane structure. The plurality of nano-gaps is filled with a dielectric material. The method also includes removing the dielectric material and a portion of the conducting or dielectric barrier layer to expose the portions in the nano-gaps of the first copper layer. The method may further include depositing a dielectric coating layer over the top portion and exposed side portions of the first copper layer to form a protected first copper layer, and filling the gaps with an electrically-tunable dielectric material that has an electrically-tunable refractive index.
Source: PVGPATDIS, file of 2026-04-10 (ipg210406.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Elwha LLC 1,209 patents | US company or organization | Bellevue, WA | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Gleb M. Akselrod | Bellevue, WA | 46 | PVGPATDIS, file of 2026-04-10 | |
| Erik Edward Josberger | Seattle, WA | 19 | PVGPATDIS, file of 2026-04-10 | |
| Mark C. Weidman | Bellevue, WA | 18 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| C23C | Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general | C23C28/322 | PVGPATDIS, file of 2026-04-10 |
| C25D | Processes for the electrolytic or electrophoretic production of coatings; electroforming; apparatus therefor | C25D3/38 | PVGPATDIS, file of 2026-04-10 |
| G02B | Optical elements, systems or apparatus | G02B1/002 | PVGPATDIS, file of 2026-04-10 |
| G02F | Optical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein; non-linear optics; frequency-changing of light; optical logic elements; optical analogue/digital converters | G02F1/19 | PVGPATDIS, file of 2026-04-10 |
| G03H | Holographic processes or apparatus | G03H1/02 | PVGPATDIS, file of 2026-04-10 |
| B82Y | Specific uses or applications of nanostructures; measurement or analysis of nanostructures; manufacture or treatment of nanostructures | B82Y40/00 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2024-08-20 | Assignment Assignment of assignor's interest | INVENTION SCIENCE FUND II, LLC signed 2024-06-28 | METAVC PATENT HOLDING COMPANY SISTERS, OR | 68723/735 | PASDL, file of 2026-10-15 |
| 2024-08-20 | Assignment Assignment of assignor's interest | ELWHA LLC signed 2024-06-28 | INVENTION SCIENCE FUND II, LLC BELLEVUE, WA | 68723/636 | PASDL, file of 2026-10-15 |
| 2018-05-25 | Assignment Assignment of assignor's interest | AKSELROD, GLEB M. signed 2018-04-03 WEIDMAN, MARK C. signed 2018-04-03 JOSBERGER, ERIK E. signed 2018-04-09 | ELWHA LLC BELLEVUE, WA | 45902/210 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.